---
type: product
schema_version: 1
stock_number: "47431-1"
canonical_url: "https://www.artisantg.com/47431-1/MKS-Instruments-910-11020"
json_url: "https://www.artisantg.com/47431-1/MKS-Instruments-910-11020.json"
generated_at: "2026-11-06T23:39:58.069Z"
last_updated: "2026-10-14T13:00:51.160-05:00"
---

# MKS Instruments 910-11020 DualTrans MicroPirani/Absolute Piezo Transducer

_Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._

## Summary

- Manufacturer: MKS Instruments
- Model: 910-11020
- Condition: Used and in Excellent Condition
- Price: Quote only
- Availability: Not in Stock
- Warranty: 1-Year Warranty with 30-Day Return Guarantee
- ITAR restricted: No
- Shipping weight: 1 lb, estimated
- Shipping dimensions: 8X8X3 in, estimated

## Categories

- Industrial Systems Equipment > Sensors and Transducers > Transducers (primary)

## Details

### Configuration

- Flange: KF16
- Interface: RS232/Analog
- Analog Out: Standard MKS
- Connector Relays: SubD 15-Pin HD Male/No Relay
- Enclosure: Standard/Viton Sealing

Part Number: 910-11020

## Function

Measures vacuum pressure from atmosphere to 1x10^-5 Torr using dual sensor technology combining thermal conductivity MicroPirani sensor for medium vacuum and piezo-resistive sensor for rough vacuum. Provides continuous pressure measurement with automatic sensor switching. Outputs pressure data via RS232 serial communication and analog voltage signal proportional to log pressure. Interfaces through high-density 15-pin SubD connector. KF16 flange enables direct mounting to vacuum chambers. Viton seals provide chemical compatibility. Applications include vacuum process control, pump monitoring, chamber pressure measurement, and leak detection in semiconductor, coating, and analytical instruments.

## Images

- <https://www.artisantg.com/itemimages/mks_instruments_910_11020_view1_202642811426.jpg>
- <https://www.artisantg.com/itemimages/mks_instruments_910_11020_view2_202642811426.jpg>
- <https://www.artisantg.com/itemimages/mks_instruments_910_11020_view3_202642811426.jpg>
- <https://www.artisantg.com/itemimages/mks_instruments_910_11020_view4_202642811426.jpg>
