--- type: product schema_version: 1 stock_number: "47807-2" canonical_url: "https://www.artisantg.com/47807-2/MKS-Instruments-352021" json_url: "https://www.artisantg.com/47807-2/MKS-Instruments-352021.json" generated_at: "2026-11-07T20:01:52.477Z" last_updated: "2026-10-14T13:00:51.160-05:00" --- # MKS Instruments / Granville-Phillips 352021 Vacuum Gauge Controller with DeviceNet _Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._ ## Summary - Manufacturer: MKS Instruments - Model: 352021 - Condition: Used and in Excellent Condition - Price: $995.00 USD - Availability: In stock, 3 available - Warranty: 1-Year Warranty with 30-Day Return Guarantee - ITAR restricted: No - Shipping weight: 4 lb, estimated - Shipping dimensions: 12X9X6 in, estimated ## Categories - Lab & Analytical > Controllers (primary) ## Function Provides real-time vacuum pressure measurement and control for process monitoring applications. Interfaces with ionization gauges, thermocouple gauges, and capacitance manometers through analog and digital inputs. Features dual-channel capability with independent gauge control, setpoint relay outputs for process automation, analog output signals for data logging, and RS-232/RS-485 serial communication for remote monitoring. Displays pressure readings in multiple units with logarithmic and linear scales. Includes programmable setpoints, gauge degas control, emission current adjustment, and filament protection features. Commonly used in semiconductor manufacturing, thin-film deposition, vacuum furnaces, and analytical instrumentation systems. ## Images - - - -