--- type: product schema_version: 1 stock_number: "52999-2" canonical_url: "https://www.artisantg.com/52999-2/MKS-Instruments-830" json_url: "https://www.artisantg.com/52999-2/MKS-Instruments-830.json" generated_at: "2026-11-07T14:57:42.367Z" last_updated: "2026-10-14T13:00:51.160-05:00" --- # MKS Instruments / Granville-Phillips 830 Vacuum Quality Monitor Controller _Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._ ## Summary - Manufacturer: MKS Instruments - Model: 830 - Condition: Used and in Excellent Condition - Price: $395.00 USD - Availability: In stock, 1 available - Warranty: 1-Year Warranty with 30-Day Return Guarantee - ITAR restricted: No - Shipping weight: 3.5 lb, estimated - Shipping dimensions: 14X14X6 in, estimated ## Categories - Industrial Systems Equipment > PLCs and Controllers > Controllers (primary) ## Details The full model number is unknown. ## Function Monitors vacuum quality in thin film deposition, semiconductor fabrication, and industrial processes via real-time measurement of gas composition, pressure, and contamination levels using integrated sensors and control algorithms; interfaces with vacuum pumps, gauges, and process controllers through analog/digital I/O for automated regulation and diagnostics. ## Images - - - -