---
type: product
schema_version: 1
stock_number: "68552-64"
canonical_url: "https://www.artisantg.com/68552-64/Brooks-Instrument-UFC-1100A"
json_url: "https://www.artisantg.com/68552-64/Brooks-Instrument-UFC-1100A.json"
generated_at: "2026-11-07T06:50:14.857Z"
last_updated: "2026-07-22T19:05:39.713-05:00"
---

# Brooks Instrument  / Celerity / Unit Instruments UFC-1100A Silane Gas, 2 SLM, Mass Flow Controller

_Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._

## Summary

- Manufacturer: Brooks Instrument
- Model: UFC-1100A
- Condition: Used and in Excellent Condition
- Price: Quote only
- Availability: Not in Stock
- Warranty: 1-Year Warranty with 30-Day Return Guarantee
- ITAR restricted: No
- Shipping weight: 5 lb
- Shipping dimensions: 14X14X6 in

## Categories

- Lab & Analytical > Controllers (primary)

## Details

### Configuration

- Range: 2 SLM
- Gas: SiH4
- Response: Fast
- Attitude: H
- Autoshut
- C REF: 0C, 760TORR
- Cal: CH4 EXH: ATM
- Valve: NC Downstream
- Seals: V/V
- Sensor: E
- PCB: 210FQ
- Jet: 3
- Connection: Card Edge Pinout

## Images

- <https://www.artisantg.com/itemimages/brooks_instrument_celerity_unit_instruments_ufc_1100a_view1_2020102711123.jpg>
- <https://www.artisantg.com/itemimages/brooks_instrument_celerity_unit_instruments_ufc_1100a_view2_2020102711123.jpg>
- <https://www.artisantg.com/itemimages/brooks_instrument_celerity_unit_instruments_ufc_1100a_view3_2020102711123.jpg>
- <https://www.artisantg.com/itemimages/brooks_instrument_celerity_unit_instruments_ufc_1100a_view4_2020102711123.jpg>