--- type: product schema_version: 1 stock_number: "97192-2" canonical_url: "https://www.artisantg.com/97192-2/MKS-Instruments-974" json_url: "https://www.artisantg.com/97192-2/MKS-Instruments-974.json" generated_at: "2026-11-07T12:52:31.503Z" last_updated: "2026-10-14T13:00:51.160-05:00" --- # MKS Instruments 974 QuadMag Cold Cathode Transducer _Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._ ## Summary - Manufacturer: MKS Instruments - Model: 974 - Condition: Used and in Excellent Condition - Price: $1,400.00 USD - Availability: In stock, 1 available - Warranty: 1-Year Warranty with 30-Day Return Guarantee - ITAR restricted: No - Shipping weight: 2 lb, estimated - Shipping dimensions: 12X9X6 in, estimated ## Categories - Industrial Systems Equipment > Sensors and Transducers > Transducers (primary) ## Details ### Configuration - Sensor Type: Cold Cathode / MicroPirani (MEMS Thermal Conductivity) / Piezo Differential (MEMS Diaphragm) - Measuring Range Absolute: 1 x 10-8 Torr to 1500 Torr - Measuring Range Differential: -760 to +760 Torr - Set Point Range Absolute: 1 x 10-8 Torr to 1000 Torr - Set Point Range Differential: -760 to +100 Torr - Digital Communications: RS485 or RS232 - Flange: NW25 KF - Interface: RS232 - Analog Out: Standard MKS - Connector Relay: SubD 15-Pin HD Male/(3) Relays - Enclosure Sealing: Standard/Viton Sealing Part Number: 974-21030 ## Function Multi-sensor vacuum transducer combining cold cathode ionization gauge, MEMS thermal conductivity sensor, and MEMS piezo differential sensor for wide-range pressure measurement from 1×10?8 to 1500 Torr absolute and ±760 Torr differential. Provides simultaneous vacuum and differential pressure monitoring with three programmable relay setpoints, analog voltage output proportional to pressure logarithm, and digital communication via RS232/RS485 protocols. Interfaces through SubD 15-pin HD connector for relay control and separate connectors for analog and digital signals. Mounts via NW25 KF flange for direct vacuum chamber integration in semiconductor processing, coating systems, and research applications requiring comprehensive pressure monitoring. ## Images - - - -