--- type: product schema_version: 1 stock_number: "97192-3" canonical_url: "https://www.artisantg.com/97192-3/MKS-Instruments-972B" json_url: "https://www.artisantg.com/97192-3/MKS-Instruments-972B.json" generated_at: "2026-11-06T23:39:42.308Z" last_updated: "2026-10-14T13:00:51.160-05:00" --- # MKS Instruments 972B DualMag Cold Cathode Transducer _Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._ ## Summary - Manufacturer: MKS Instruments - Model: 972B - Condition: Used and in Excellent Condition - Price: $875.00 USD - Availability: In stock, 1 available - Warranty: 1-Year Warranty with 30-Day Return Guarantee - ITAR restricted: No - Shipping weight: 2 lb, estimated - Shipping dimensions: 9X9X3 in, estimated ## Categories - Industrial Systems Equipment > Sensors and Transducers > Transducers (primary) ## Details ### Configuration - Sensor Type: Cold Cathode / MicroPirani (MEMS Thermal Conductivity) - Measuring Range Absolute: 1 x 10-8 Torr to Atmosphere - Set Point Range Absolute: 1 x 10-8 Torr to Atmosphere - Set Point Range Differential: -760 to +100 Torr - Digital Communications: RS485, RS232 or EtherCAT - Flange: NW25 KF - Interface: RS232 - Analog Out: Standard MKS - Connector Relay: SubD 15-Pin HD Male/(3) Relays - Enclosure Sealing: Standard/Viton Sealing Part Number: 972B-21030 ## Function Dual-sensor vacuum transducer combining cold cathode ionization gauge and MEMS-based thermal conductivity sensor for wide-range pressure measurement from ultra-high vacuum to atmosphere. Provides continuous pressure monitoring with three configurable relay setpoints for process control. Features RS232/RS485/EtherCAT digital interfaces and analog output for integration with vacuum controllers and PLCs. NW25 KF flange enables direct chamber mounting. Viton-sealed enclosure ensures compatibility with corrosive environments. Common applications include semiconductor processing, thin film deposition, analytical instrumentation, and research vacuum systems requiring precise pressure measurement across multiple decades. ## Images - - - -