Coherent / Lambda Physik K2005 248 nm, CaF2, Excimer Laser
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Coherent / Lambda Physik K2005 248 nm, CaF2, Excimer Laser



This Coherent / Lambda Physik K2005 248 nm, CaF2, Excimer Laser is used and in excellent condition. This unit was decommissioned from a production facility. We do not have the ability to test this unit and have documented all the information we can gather from it in this page. A very good effort was made to retain accessories. This item will be sold as/is without warranty and will be priced accordingly for parts/repair, although the actual operating condition is unknown. Please see photos below for what is included with this unit.

Model: Novaline K2005
Manufacture Year: 2001
Input Voltage: 380-400 VAC, 3 Phase, 50-60 Hz
Installed Laser: KrF
Laser Wavelength: 248 nm

Photos of the laser and its open panels/electronics are posted near the bottom of this page.

Photos of included accessories:
View Photo of controller.
View Photo of included accessories.
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View Photo of accessories inside of parts case, whole layout.
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View Photo of accessories from inside of parts case, view 6.
View Photo of checklist for parts case.
View Photo of circuits and block diagrams.
View Photo of software diskettes.




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Stock # 62024-1
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Coherent / Lambda Physik K2000 Series Excimer Lasers

Features
  • 248 nm KrF Laser
  • Output Power Available Up To Reliable 2 kHz Repetition Rate
  • Spectral Purity Available with < 0.4 pm bandwidth, FWHM
  • Solid State Pulser Delivers High Consistency and High MTBF Performance
  • Complete Data-Logging Capabilities

Description

Lambda Physik lasers have an advanced modular design that reduces the need for replacement parts, decreases the cost of consumables, and provides exceptional reliability for industrial operation. All mechanical, electronic, and optical modules offer easy maintenance and integration for microlithography applications. Maintenance access is on one side of the NovaLine unit, allowing a smaller footprint to provide more valuable cleanroom floor space and easy servicing. NovaLine has an internal computer that provides all the necessary diagnostic information required to ensure highly stable, trouble-free operation.

NovaLine K2005

The line-narrowed model K2005 offers extremely narrow linewidth of less than 0.4 pm, FWHM, with 95 percent of the energy within a wavelength interval of less than 1.25 pm. In addition to the width at half maximum (FWHM), the spectral distribution of the laser output determines the contrast of the imaging lens. Based on the patented PCR resonator, the K2005 produces an extremely narrow output spectrum to optimize performance of advanced DUV lithography scanners with numerical apertures as high as 0.8.

NovaLine K2010

NovaLine K2010 lasers are installed in quantities on the manufacturing floor. High reliability and low CoO has allowed Lambda Physik to steadily grow a customer base for this laser. The lasers operate with 2 kHz and 20 W output power. The bandwidth of 0.6 pm makes the K2010 compatible with most OEM DUV scanner systems.

NovaLine K2020

The K2020 model has been designed for high throughput DUV scanner systems using a catadioptric imaging lens. This laser system, with a bandwidth of about 50 pm, provides high efficiency and significantly lower operating costs. The resonator is optimized for the relaxed bandwidth requirement. As a result, the output power is increased to 30 W and the overall operating cost of this DUV laser is reduced. Optimization of the NovaTube and discharge circuitry provide highly stable output with a standard deviation of less than 1 percent at 2 kHz repetition rate. PowerLok, a Lambda Physik proprietary energy control system, stabilizes the exposure dose with an accuracy of typically ±0.25 percent.


Product Family: K2000, K-2000, K 2000, K2005, K-2005, K 2005, K2010, K-2010, K 2010, K2020, K-2020, K 2020


Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.


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Specifications

K2005
Wavelength248 nm
Spectral Bandwidth (FWHM)< 0.4 pm
Spectral Purity (95% Energy Integral)< 1.25 pm
Repetition Rate2 kHz
Power20 W
Pulse Energy10 mJ
Dose Energy Stability< +/-0.35 %
Gas Lifetime> 200 million Pulses
Laser Tube Lifetime> 4 billion Pulses
Cabinet Size (L x W x H)1826 x 830 x 1548 mm
Weight1075 kg


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Item Images

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Coherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer Lasers
Coherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer Lasers
Coherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer Lasers
Coherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer Lasers
Coherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer Lasers
Coherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer Lasers
Coherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer LasersCoherent / Lambda Physik K2000 Series Excimer Lasers


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