---
type: product
schema_version: 1
stock_number: "63500-10"
canonical_url: "https://www.artisantg.com/Ecotech/63500-10/KLA-Tencor-CRS-3100-Optical-Review-System"
json_url: "https://www.artisantg.com/Ecotech/63500-10/KLA-Tencor-CRS-3100-Optical-Review-System.json"
generated_at: "2026-11-07T05:41:21.608Z"
last_updated: "2026-07-30T09:10:57.047-05:00"
---

# KLA Tencor CRS-3100 Optical Review System

_Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._

## Summary

- Manufacturer: KLA Tencor
- Model: CRS-3100
- Condition: Parts Grade / As-Is
- Price: Quote only
- Availability: Not in Stock
- Warranty: No Warranty
- ITAR restricted: No
- Shipping weight: 2000 lb
- Shipping dimensions: CUSTOM CRATE in

## Categories

- Semiconductor > Semiconductor (primary)

## Details

This system appears to be complete. System includes: CRS-3100 Optical Review System, Sony Trinitron Color Video Monitor, Toshiba Image Master Digital Video Printer, Sony Trinitron Multiscan Monitor, Blower, Hoses for Blower, Keyboard and Mouse, Emergency Stop Switch, RGB Video Cables, Toshiba Remote Printer Control, VGA Cable (Box), XYZ Controller. For specific photos of what is included, see bottom of this stock-item.

We do not have the expertise to fully test this unit and have documented all the information gathered from it in this page. It is recommended that the purchaser of this system contact KLA-Tencor for installation, setup and maintenance.  A very good effort was made to retain accessories. This item will be sold as/is without warranty and will be priced accordingly. However, if desired, this unit can be inspected on-site. Please contact Artisan Technology Group Sales to set this up.

This unit will ship in several crates. See picture section for photo of crates.

### PC Configuration

- Processor: Pentium III 850Mhz
- OS: Windows NT 4.0 SP6
- Memory: 265 MB RAM
- Hard Drive: 17 GB HDD
- Keyboard, Mouse and Monitor Included

### Software Installed

- Hummingbird Connectivity V7.0
- Equinox Quickview V530
- Equinox V4.16
- Iomega
- Iomega backup
- EQT32 V3.15
- Adobe Acrobat 4.0
- KLA Tencor 2.1.3
- KLA Tencor CRS V6.0.0.13 June 13 2004

Input Voltage: 208VAC, Single Phase

View Photo of CRS 3100

View Photo of CRS 3100

View Photo of CRS 3100

View Photo of the system connected to computer

View Photo of hour meter for the laser

View Photo of computer, emergency stop and xyz controller

View Photo of video monitor and printer

View Photo of blower motor and hoses

View Photo of locator plates

## Images

- <https://www.artisantg.com/itemimages/tencor_crs_3100_system1_side_view3.jpg>
