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KLA Tencor / Filmetrics F30 In-situ Deposition and Etch Monitor
Configuration:
• Thickness Range: 15nm - 70μm
• Wavelength Range: 380-1050nm
Polaron / Quorum Technology SEM Coating System
This Polaron SEM Coating System is used and in excellent condition. This unit is missing the glass of the workchamber which needs to be replaced, but otherwise seems complete. The item ships as(...) pictured and comes with no other spares including electrodes, discs, targets, accessories, or documentation.

View Photo of the chamber off the unit.
View Photo of the inside of the chamber.

Input Voltage: 115V

Veeco / Wyko RST-Plus Rough Surface Tester Optical Profilometer
This Wyko Rough Surface Tester RST-Plus Optical Profilometer is used and in excellent condition. This unit includes: Microscope, Support Stage, Control Boxes, Vibration Isolation Table, Computer,(...) Color Display, Video Monitor, Printer, Joystick, Mouse, and Keyboard.

Computer Configuration:
Processor: Pentium 90 MHz
HDD: 1.24 GB
Memory: 32 MB
OS: Windows 95
Software Installed: Wyko Vision Plus v1.8

Available Filter Settings:
LoMag 0.0 nm
LoMag 650.8 nm
LoMag Clear
HiMag 660.0 nm
HiMag Clear

Monitors Dimensions:
36" W x 59" H x 36" D (91.4cm W x 149.86cm H x 91.4cm D)
Scope Dimensions:
32" W x 59" H x 36" D (81.28cm W x 149.86cm H x 91.4cm D)

Our technicians fully tested this unit. Here are some software screen captures as well as some data scans/tests that were run: Screen Captures (pdf).

Inficon / Sigma Instruments EIES-IV Guardian Thin Film Deposition Controller
This Sigma Instruments EIES-IV Guardian Thin Film Deposition Controller is used and in excellent condition. This version does not have the High-Voltage LED on the front panel.

Part Number: 900-051
Zygo ZMI-4004 4-Axis VME64x Measurement Board
This Zygo ZMI-4004 4-Axis VME64x Measurement Board is new from surplus stock.

Part Number: 8020-0500-01
Universal Systems / Trio-Tech Stainless Steel Wet Process Station
This Universal Systems / Trio-Tech Stainless Steel Wet Process Station is used and in excellent condition. This wet bench has all the connections and accessories shown in the pictures below. It is(...) a solvent wash station with ultrasonic rinse. Handheld water spray and nitrogen gas spray installed. External Exhaust, CDA (Clean Dry Air), Nitrogen, and Water required for operation.

Model Number: US72 VLF FA-1976

It comes with (2) sweepSONIK 40kHz dualSweep Ultrasonic Generators (the connectors for these are on the bottom rear of unit) both are model number: 40-S2DG-12T-208V-C, a top exhaust fitting, and a plexi-glass top guard.

Main Unit:
Controls: 977E Emergency Power Off

Tanks 1 and 3:
Operation: Ultrasonic Rinse and Drain
Dimensions: 14x10x8.5 in (WxLxD)
Controls: Universal 977C Controller w/ Timer
Lid Included

Tanks 2 and 4:
Operation: QDR Quick Dump and Rinse (Drain)
Dimensions: 14x10x8.5 in (WxLxD)
Controls: Universal 977T Timer
Lid Included

Tank 5:
Operation: Washing Station and Drain
Dimensions: 14x10x8.5 in (WxLxD) w/ Spillover Ledge
Controls: Universal 977T Timer

Coherent / Lambda Physik HT501 Laser Controller
This Coherent / Lambda Physik HT501 Laser Controller is used and in excellent condition. This unit is also known as a KEBA HT501.

Part Number: HT501-LAMBDA konf. / 571118
EMTS/Electroglas 2001X P/S Automatic Wafer Prober
This EMTS/Electroglas 2001X P/S Automatic Wafer Prober is used and in excellent condition. It includes the cables and accessories listed below and pictured. Computer sold separately. We do not have(...) the expertise to fully test this unit and have documented all the information gathered from it in this page. It is recommended that the purchaser of this system contact the manufacturer for replacement components.

System Configuration:

• Navitar Uni-lite 1x Coaxial Illuminator
• DF-150-3 Dark Field Illuminator
• Sanyo Black and White Video Monitor (has some screen burn-in artifacts)
• Control Keyboard (Missing Enter and Plus Keys)
• Joystick Controller and Keypad (Missing Plus key)
• Power Source with Camera Lighting Controls
• Sola MCR 2000 Power Regulator (not pictured)
• (3) 25-slot Wafer Probe Cassette (not pictured)

CIVision Wafer Inspection System:

• Model: 1 Camera Lowmax
• CIVision Manual
• Software CD: APC PowerChute Personal Edition
• Software CD: eVGA Display Driver Installation
• Software CD: Measurement Computing
• Software CD: Intel Express Installer CD
• Software CD: ViewSonic Wizard: User Guide and Installation
• Software 3 1/4 Floppy: RAID Driver

Basler A311f Camera:

• Video Output: Mono
• Sensor Size 659x494
• Sensor Type: Progressive Scan CCD
• Max Frame Rate: 73 Frames/s
• Video Output: IEEE 1394

View Photo of the joystick controller.
View Photo of the monitor and control keyboard.

Pace TF-2000 BGA / CSP Rework System
This PACE TF-2000 BGA / CSP Rework System is used and in good condition. The PC, software, connection cables, cooling fan, or other attachements are not included. Please contact manufacturer for(...) pricing and availability.

System Configuration:
• Base Station: TF 2000BE
• Reflow Station: TF 2000R
• Placement Station: TF 2000P
• Input Voltage: 230VAC


Asyst Technologies / MECS CS-1000 Wafer Robot Control System
Configuration:
• (2) Cables Included - Meant to connect to the UTX-1100 Wafer Robot
• UTC-P / UTC-S Module Installed
• RS232C-1 / EXT-1 Module Installed
(...)
• EXT-2 Module Installed
• Input Voltage: 115 VAC Only

Coherent / Lambda Physik K2005 248 nm, CaF2, Excimer Laser
This Coherent / Lambda Physik K2005 248 nm, CaF2, Excimer Laser is used and in excellent condition. This unit was decommissioned from a production facility. We do not have the ability to test this(...) unit and have documented all the information we can gather from it in this page. A very good effort was made to retain accessories. This item will be sold as/is without warranty and will be priced accordingly for parts/repair, although the actual operating condition is unknown. Please see photos below for what is included with this unit.

Model: Novaline K2005
Manufacture Year: 2001
Input Voltage: 380-400 VAC, 3 Phase, 50-60 Hz
Installed Laser: KrF
Laser Wavelength: 248 nm

Photos of the laser and its open panels/electronics are posted near the bottom of this page.

Photos of included accessories:
View Photo of controller.
View Photo of included accessories.
View Photo of parts case.
View Photo of accessories inside of parts case, whole layout.
View Photo of accessories from inside of parts case, view 1.
View Photo of accessories from inside of parts case, view 2.
View Photo of accessories from inside of parts case, view 3.
View Photo of accessories from inside of parts case, view 4.
View Photo of accessories from inside of parts case, view 5.
View Photo of accessories from inside of parts case, view 6.
View Photo of checklist for parts case.
View Photo of circuits and block diagrams.
View Photo of software diskettes.

Veeco / Wyko RST-Plus Rough Surface Tester Optical Profilometer
This Wyko Rough Surface Tester RST-Plus Rough Surface Tester Optical Profilometer is used and in excellent condition. This unit includes: Microscope, Support Stage, Control Boxes, Computer, Color(...) Display, Illuminator Lamp, Mouse, and Keyboard.

Computer Configuration:
Processor: Pentium 90 MHz
Memory: 32 MB
OS: Windows 95
Software Installed: Wyko Vision Plus v1.8

Filter Options:
• None

Installed Objectives:
• RX2.5
• RX10
• RX40

Our technicians fully tested this unit. Here are some software screen captures as well as some data scans/tests that were run: Screen Captures (pdf).

Helmut-Fischer Fischerscope XDAL-FD EDXRF Spectrometer
This Helmut-Fischer Fischerscope XDAL-FD EDXRF Spectrometer is used and in excellent condition.

Configuration:
• FD: Fast Detector
• Tube: Micro
(...)
• Detector: PIN
• Filters: 3
• Aperture: 4
• Probe Placing: XYZ
• CPU: 1.8 Ghz P4, 1GB RAM, 20GB HDD, Windows XP, XDAL-FT Software v6.19 with Monitor, Keyboard and Mouse

Input Voltage: 120 VAC Only

Click here to view the photo of a wafer taken with the device's on-board camera by an Artisan Technology Group technician.

Parts and Accessories:
• (1) FI-SIM WinFTM Super X720 (Security USB Dongle)
• (3) WINFTM V6 CDs (Version: 6.13, 6.14, 6.19)
• (1) Serial Cable for connecting device to computer
• (1) Video Cable for camera

Click here to view a photo of the parts and accessories.

Inficon / Sigma Instruments EIES-IV Guardian Thin Film Deposition Controller w/ High-Voltage LED
This Inficon / Sigma Instruments EIES-IV Guardian Thin Film Deposition Controller is used and in excellent condition. This version features a High-Voltage LED on the front panel.

Part Number: 900-051
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