Zygo ZMI-4004 4-Axis VME64x Measurement Board
  • Zygo_ZMI_4004_View1_201562611121
  • Zygo_ZMI_4004_View2_201562611121
  • Zygo_ZMI_4004_View3_201562611121

Zygo ZMI-4004 4-Axis VME64x Measurement Board

This Zygo ZMI-4004 4-Axis VME64x Measurement Board is used and in excellent condition.

Part Number: 8020-0500, 8020-0500-01, 8020-0500-01-J, 8020-0500-J

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Stock # 85520-1
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Zygo ZMI-4004 4-Axis VME64x Measurement Board

  • 0.15 nm Resolution
  • 2.55 m/sec Velocity
  • 4-Axes Per Board
  • 10 MHz Data Rate
  • ST Fiber Optic and HSSDC Electrical Connections


The Zygo ZMI-4004 4-Axis VME64x Measurement Board enables next generation lithography tools to achieve significantly improved overlay and higher throughputs. The ZMI-4004 is part of a total Displacement Measuring Interferometer solution insuring the highest resolution and velocity while providing superior dynamic accuracy and data age uncertainty.

Product Family: ZMI-4OO4, 8020-0500-01 8020-0102-09

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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Zygo ZMI-4004 4-Axis VME64x Measurement BoardZygo ZMI-4004 4-Axis VME64x Measurement BoardZygo ZMI-4004 4-Axis VME64x Measurement Board

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