---
type: product
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stock_number: "63500-76"
canonical_url: "https://www.artisantg.com/PLC/63500-76/KLA-Tencor-2002-0142-022-Robot-I-O-Control-Board"
json_url: "https://www.artisantg.com/PLC/63500-76/KLA-Tencor-2002-0142-022-Robot-I-O-Control-Board.json"
generated_at: "2026-11-07T01:30:08.546Z"
last_updated: "2026-10-25T19:05:40.253-05:00"
---

# KLA Tencor 2002-0142-022 Robot I/O Control Board

_Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._

## Summary

- Manufacturer: KLA Tencor
- Model: 2002-0142-022
- Condition: Used and in Excellent Condition
- Price: Quote only
- Availability: Not in Stock
- Warranty: 1-Year Warranty with 30-Day Return Guarantee
- ITAR restricted: No
- Shipping weight: 3 lb, estimated
- Shipping dimensions: 12X9X6 in, estimated

## Categories

- Semiconductor > Semiconductor Parts (primary)

## Details

This board is also known as the Brooks / PRI Automation / Equipe Technologies 2002-0142-022.

## Images

- <https://www.artisantg.com/itemimages/kla_tencor_2002_0142_022_view1_20163494954.jpg>
- <https://www.artisantg.com/itemimages/kla_tencor_2002_0142_022_view2_20163494954.jpg>
- <https://www.artisantg.com/itemimages/kla_tencor_2002_0142_022_view3_20163494954.jpg>
