Particle Measuring Systems LiQuilaz SO5-HF Particle Counting Spectrometer for Liquids
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Particle Measuring Systems LiQuilaz SO5-HF Particle Counting Spectrometer for Liquids

This Particle Measuring Systems LiQuilaz SO5 Particle Counting Spectrometer for Liquids is parts grade unit. This item will be sold as-is, without warranty, and will be priced accordingly. If you would like to purchase an individual component of this unit, please contact Artisan Technology Group Sales for pricing and availability.


• Size Range: 0.5-20.0 µm
• Flow rate (ml/min.): 80 mL/min. ±10%
• Sample Volume: Volumetric 80 mL/min. (100%)
• Zero Count: <15 counts/liter
• Power: 85-250 V, 50-60 Hz
• Maximum Pressure: 100 psi
Option HF: Hydrogen Fluoride Compatible

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Stock # 65969-13
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Particle Measuring Systems LiQuilaz Syringe Sampling System

  • Real-Time Characterization and Analysis
  • Volumetric Measurements
  • Small Footprint
  • User-Selectable Particle Size Thresholds


The LiQuilaz® optical particle counters are volumetric particle counters with a variety of sizing sensitivities as low as 0.2 microns. They provide high precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 150C.

Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 mL/min.) so that short sampling intervals can be utilized without sacrificing statistical significance.

Product Family: Liquilaz, SO5, S05, S02, LS-200, SO, S0, SO2

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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Size RangeLiQuilaz SO2: 0.2-2.0 µm
LiQuilaz SO3: 0.3-3.0 µm
LiQuilaz SO5: 0.5-20.0 µm
Flow rate (ml/min.)LiQuilaz SO2: 50 mL/min. ±10%
LiQuilaz SO3: 80 mL/min. ±10%
LiQuilaz SO5: 80 mL/min. ±10%
Sample VolumeLiQuilaz SO2: Volumetric 50 mL/min. (100%)
LiQuilaz SO3: Volumetric 80 mL/min. (100%)
LiQuilaz SO5: Volumetric 80 mL/min. (100%)
Maximum Concentration10,000 particles/mL
Sample Temperature10 - 150C: Sulfuric acid 100C maximum
Zero CountLiQuilaz SO2: <25 counts/liter
LiQuilaz SO3: <15 counts/liter
LiQuilaz SO5: <15 counts/liter
Maximum Pressure100 psi
Laser SourceLaser diode
Wetted Surface MaterialsTeflon®, Kel-F®, sapphire, Kalrez®4079
Dimensions (l, w, h)13 x 4 x 5 inches (32 x 11 x 11 cm)
Weight6 lbs. (3 kg)
PowerLiQuilaz SO2: 85-132 V or 220-240 V, 50-60 Hz
LiQuilaz SO3: 85-250 V, 50-60 Hz
LiQuilaz SO5: 85-250 V, 50-60 Hz
CalibrationMaterials used are traceable to U.S. National Institute of Standards and Testing (NIST) and/or Japanese Institute of Standards (JIS).
EnvironmentTemperature: 10-35C Humidity: non-condensing

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Particle Measuring Systems LiQuilaz Syringe Sampling SystemParticle Measuring Systems LiQuilaz Syringe Sampling SystemParticle Measuring Systems LiQuilaz Syringe Sampling System
Particle Measuring Systems LiQuilaz Syringe Sampling System

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