Vacuum General Mass Flow Modules
  • vg_fc6_21_view1
  • vg_fc6_21_view2
  • vg_fc6_21_view3
  • vg_fc6_21_view4
  • vg_fv6_41_view1
  • vg_uv2_31_view1

Vacuum General Mass Flow Modules

Features

  • Wide Range of Modules
  • 500 PSI Max
  • 15-Pin Serial Connection

View our selection of these items below.


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Configuration:

• Gas: N2
• Range: 0-100
• Flow Measurement: SCCM
• Sensitivity: Attitude Insensitive



Stock # 66044-1


Stock # 66044-11


Stock # 66044-12




Configuration:

• Gas: N2
• Range: 0-1
• Flow Measurement: SLM
• Sensitivity: Attitude Insensitive



Stock # 66044-3




The part number of this unit is unknown.

Configuration:
• Gas: O2
• Range: 20
• Flow Measurement: SCCM




Stock # 66044-9




Configuration:

• Gas: N2
• Range: 0-10
• Flow Measurement: SLM
• Sensitivity: Attitude Insensitive



Stock # 66044-2



  • Description
  • Tech Specs
  • Datasheets / Manuals 
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Description

This page features Vacuum General Mass Flow Modules that offer a wide range of modules, a 500 PSI maximum flow pressure and a 15-pin serial connection.
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Specifications

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Resources

Manuals, Datasheets, Drivers, Links

Link to Vacuum General Website