MKS Instruments 1479A13CR1BM-S Mass Flow Controller
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  • MKS_Instruments_1479A13CR1BM_View1_20181025162515

MKS Instruments 1479A13CR1BM-S Mass Flow Controller

• Gas: NHS
• Range: 500 SCCM
• Fittings: Swagelok 4 VCR Male
• Valve: Normally Closed
• Connector: Analog 15 Pin Type D
• Seals Materials: Teflon Valve Plugs

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Stock # 72554-1
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MKS Instruments 1479 Series Mass Flow Controllers

  • Patented Sensor Design Provides Exceptional Zero Stability
  • Full Scale Flow Ranges from 10 SCCM to 20 SLM for Precise and Repeatable Flow Measurement and Control
  • Percent of Full Scale Accuracy for Analog Configurations
  • MTBF Analysis and STRIFE Testing to Ensure Long Term Performance
  • < 10 RA Electropolish Finish of Wetted Stainless Surfaces
  • CE Mark Compliant


The MKS 1479 Series Mass Flow Controllers are an economical metal-sealed mass flow controller designed to measure and control the flow of gases in high purity applications. The Type 1479 Mass-Flo® Controller is available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. The 1479 can also be used as a pressure controller when connected to a suitable pressure transducer.

The 1479 Series is a direct form-ft-function replacement for the most common MFC’s on the market today. The standard 3-inch footprint enables the 1479 to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same PC card edge or Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1479 is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Product Family: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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MKS Instruments 1479 Series Mass Flow ControllersMKS Instruments 1479 Series Mass Flow ControllersMKS Instruments 1479 Series Mass Flow Controllers
MKS Instruments 1479 Series Mass Flow Controllers

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Manuals, Datasheets, Drivers, Links

MKS 1479 Series Datasheet (pdf) 
Link to MKS Instruments Website 

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