Brooks Instrument 5853i Mass Flow Controller

Brooks Instrument 5853i Mass Flow Controller

Flow Rate: 120 SLPM
Gas: Air

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Stock # 77045-2
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Brooks Instrument 5853i / 5863i Mass Flow Controller and Meter

  • Easy Maintenance
  • Negligible Flow Overshoot/Undershoot
  • Removable Sensor
  • Insensitive to Mounting Attitude


The Brooks Models 5853i and 5863i Mass Flow Controller and Meter accurately measure and control high gas flow. The heart of the system is its removable, attitude-insensitive sensor which produces an electrical output signal linear with flow rate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

Product Family: 5863i

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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Brooks Instrument 5853i / 5863i Mass Flow Controller and MeterBrooks Instrument 5853i / 5863i Mass Flow Controller and Meter

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