Brooks Instrument 5853i / 5863i Mass Flow Controller and Meter
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  • Brooks_5853i_View1

Brooks Instrument 5853i / 5863i Mass Flow Controller and Meter

Features

  • Easy Maintenance
  • Negligible Flow Overshoot/Undershoot
  • Removable Sensor
  • Insensitive to Mounting Attitude

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This Brooks Instrument 5853i Mass Flow Controller is used and in excellent condition.

Flow Rate: 120 SLPM
Gas: Air





This Brooks Instrument 5863i Mass Flow Meter is used and in excellent condition.

Flow Rate: 80 SLPM
Gas: CO2





This Brooks Instrument 5863i Mass Flow Meter is used and in excellent condition.

Flow Rate: 140 SLPM
Gas: Air





This Brooks Instrument 5863i Mass Flow Meter is used and in excellent condition.

Flow Rate: 120 SLPM
Gas: Air





This Brooks Instrument 5863i Mass Flow Meter is used and in good condition.

Flow Rate: 230 SLPM
Gas: Air





This Brooks Instrument 5863i Mass Flow Meter is used and in excellent condition.

Flow Rate: 450 SLPM
Gas: CO2





This Brooks Instrument 5863i Mass Flow Meter is used and in excellent condition.

Flow Rate: 450 SLPM
Gas: Air




  • Description
  • Tech Specs
  • Datasheets / Manuals 
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Description

The Brooks Models 5853i and 5863i Mass Flow Controller and Meter accurately measure and control high gas flow. The heart of the system is its removable, attitude-insensitive sensor which produces an electrical output signal linear with flow rate used for indicating, recording, and/or control purposes. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

Product Family: 5863i
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Specifications