MKS Instruments 1152C-731K Mass Flow Controller
  • MKS_Instruments_1152C_731K_View1_2019516124054
  • MKS_Instruments_1152C_731K_View2_2019516124054
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  • MKS_Instruments_1152C_731K_View4_2019516124054

MKS Instruments 1152C-731K Mass Flow Controller

• Gas: C6H6
• Range: 300 SCCM
• Fittings: Swagelok 8 VCR Male
• Valve: Normally Closed
• Connector: 15-Pin Type D
• Seals: Nickel

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Stock # 96211-1
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MKS Instruments 1150C / 1152C Mass Flow Controllers

  • Delivers Source Vapor Without a Carrier Gas System
  • Wide Operating Temperature Range
  • All-Metal Seal Design Eliminates Contamination


The MKS Instruments 1150C / 1152C Mass Flow Controllers are pressure-based measurement and control systems designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.

The 1150 and 1152 MFCs consist of a fixed flow element and either one (1150) or two (1152) capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control (U.S. Patent No.4,679,585). The 1150 and 1152 have all components and associated circuitry contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range. A temperature sensor and voltage output is available to indicate that the 1150/1152 controllers are at an elevated temperature to prevent vapor condensation within the mechanical assembly.

Product Family: 1150C, 1150 C, 1150-C, 1150/C, 1150: C, 1152C, 1152 C, 1152-C, 1152/C, 1152: C

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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MKS Instruments 1150C / 1152C Mass Flow ControllersMKS Instruments 1150C / 1152C Mass Flow ControllersMKS Instruments 1150C / 1152C Mass Flow Controllers
MKS Instruments 1150C / 1152C Mass Flow Controllers

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