Brooks Instrument / Celerity / Unit Instruments 8100 Series High Flow Mass Flow Controllers and Meters
  • brooks_instrument_celerity_unit_instruments_ufc_8100_view1_20181029125327
  • brooks_instrument_celerity_unit_instruments_ufc_8100_view2_20181029125327
  • brooks_instrument_celerity_unit_instruments_ufc_8100_view3_20181029125327

Brooks Instrument / Celerity / Unit Instruments 8100 Series High Flow Mass Flow Controllers and Meters

Features

  • For Non-Corrosive and Non-Ultraclean Process Gas Applications (32µ Inch Ra Finish)
  • Drop-In Replacement for Any Elastomeric MFC
  • Sealed with an Elastomeric O-Ring
  • Easy Configuration Change and Maintenance
  • Better Than 0.15% Full Scale Repeatability
  • Minimized Dead Space

View our selection of these items below.


Have a quote from somewhere else? Click Here




Contact Us
Share:



Configuration:
• Category: Standard Flow Applications
• Footprint: 1.5 in.
• Digital/Analog: Analog Protocol
• Range: 5 L
• Gas: O2
• Electrical Connector Type: Card Edge
• Options: Auto Shutoff

Part Number: 286241



Stock # 98414-2




This unit has a chipped connector; however, this does not affect its ability to function properly.

Configuration:
• Category: Standard Flow Applications
• Footprint: 1.5 in.
• Digital/Analog: Analog Protocol
• Range: 2 L
• Gas: N2
• Electrical Connector Type: Card Edge
• Options: Auto Shutoff

View Photo of chipped connector.

Part Number: 286242



Stock # 98414-1




Configuration:
• Category: Standard Flow Applications
• Footprint: 1.5 in.
• Digital/Analog: Analog Protocol
• Range: 500 cc
• Gas: N2
• Electrical Connector Type: Card Edge
• Options: Auto Shutoff

Part Number: 286243



Stock # 98414-4




This unit has an installed mount.

Configuration:
• Category: Standard Flow Applications
• Footprint: 1.5 in.
• Digital/Analog: Analog Protocol
• Range: 500 SCCM
• Gas: N2
• Electrical Connector Type: Card Edge
• Options: Auto Shutoff

Part Number: 8100-101928, 286243



Stock # 98414-5




Configuration:
• Category: Standard Flow Applications
• Footprint: 1.5 in.
• Digital/Analog: Analog Protocol
• Range: 1 SLM
• Gas: N2
• Electrical Connector Type: Card Edge
• Options: Auto Shutoff

Part Number: 8100-102612, 286244



Stock # 98414-3



  • Description
  • Tech Specs
  • Datasheets / Manuals 
Contact Us
Share:

Description

The Brooks Instrument / Celerity / Unit Instruments 8100 Series High Flow Mass Flow Controllers and Meters are integrated devices that control gas flows using a high precision electromagnetic valve responding to flow measurements through a sensor using the thermal properties of gases. Since the thermal properties of gases are independent of pressure and temperature, this method provides a stable measurement with changing process conditions.

The patented IsoSensor is a high stability sensor that produces ultra-low drift, eliminating the need for frequent recalibration. It is attitude insensitive and eliminates thermal siphoning effects.

The precision electromagnetic control valve has a wide dynamic range that provides superior precision and control. It has been subjected to over 8 million cycles with no degradation in performance. It has proven to have superior reliability to piezo actuators and can also operate over a larger pressure range.

Product Family: 8100 Series, 8100, 81OO, 8101, 8105
Contact Us
Share:

Specifications