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KLA Tencor SFS-7600 Surfscan Patterned Wafer Inspection System
This KLA Tencor SFS-7600 Surfscan Patterned Wafer Inspection System is used and in good condition. We do not have the expertise to fully test this unit and have documented all the information(...) gathered from it in this page. It is recommended that the purchaser of this system contact KLA-Tencor for installation, setup and maintenance. A very good effort was made to retain accessories. This item will be sold as/is without warranty and will be priced accordingly. However, if desired, this unit can be inspected on-site. Please contact Artisan Technology Group Sales to set this up.

The aligner operated on boot up and the internal fixture accepted a 200mm wafer. The aligner takes 100, 125, 150, and 200mm wafers however the internal fixture will only take 200mm wafers; wafer racks are sold separately. The system needs both a vacuum and air source to operate. The right side keyboard door hinge is broken and the keyboard is missing two keys however this does not affect its functionality. Service screen indicates that the laser will need to be replaced. You can view image of the keyboard and service screen shot using the links below.

PC Configuration:

• Processor: 66MHz
• RAM: 23 MB
• HDD: 850 MB

Software:

• SFS: 7x00 Series Software Ver. 3.5.0

View Photo of Keyboard
Surfscan 7600 Screen Shots (pdf)

NEC Multisync LCD1550V-BK LCD Monitor
Configuration
• Dimensions: 13.6 in. Width by 6 in. Depth by 13.9 in. Height
• Contrast Ratio: 300:1
• Native Resolution: 1024 x 768 at 75 Hz
(...)
• Monitor Color: Black

Part Number: LA-15R02-BK

Excelitas / Lumen Dynamics Light Guide Adapter
Configuration:
• Front End, Exterior Diameter: 0.39 in (9.8 mm)
• Back End, Exterior Diameter: 0.99 in (25.2 mm)
MicroVision MVT 7080 Wafer Sorter
This MicroVision MVT 7080 Wafer Sorter is a parts unit and is being sold as is. The unit is incomplete. It has been priced accordingly. We do not have the expertise to fully test this unit and have(...) documented all the information gathered from it in this page.

MVT 7080 Configuration:
Holds up to (4) Cassettes
Cassettes Not Included
PC Controller Not Included

View Photo of the top surface of the unit.

Input Voltage: 110 V
Input Frequency: 60 Hz

Zygo 8020 ZMI-1000A Displacement Measuring Interferometer System VME Position Board
This Zygo 8020 ZMI-1000A Displacement Measuring Interferometer System VME Position Board is new from surplus stock.

Part Number: 8020-1206-01, 8020-0206, 8020-0206-01-J
MKS Instruments CDN396R DeviceNet Analog I/O Card
This MKS Instruments CDN396R DeviceNet Analog I/O is used and in excellent condition.

Part Number: AS01396-6-1
Keysight / Agilent 16147-60002 28-Pin Dual In-Line Socket Board
This socket board is for measurement of 28-pin package devices.
Inficon BPG400 DN 40 CF-R Bayard-Alpert Pirani Combination Gauge
This unit includes a DN 40 CF-R Flange.

Configuration:
• Seal with Center Ring and Filter

BPG400 Part Number: 353-502
Sensor Part Number: 354-491
Exfo 012-60850 100-Watt Mercury Arc with Intelli-Lamp Technology
This is also known as the EXFO 012-60850 100-Watt Mercury Arc with Intelli-Lamp Technology.

Configuration:
(...)
• Lamp Hours: 333
• Maximum Intensity Output: 18755 mW/cm2 (350-500nm Bandpass)

Part Number: 012-60850

KLA Tencor / Ultrapointe 1010 Confocal Review Station
This Ultrapointe / KLA Tencor CRS 1010 Confocal Review Station is being sold as-is without warranty and has been priced accordingly. This unit is not fully functional, but appears to be complete.(...) Please see photos for all included accessories.

Upon evaluation, our technicians discovered that the installed JDS Uniphase Model 2214-20SLUP laser does not operate. Due to this, the unit is not fully functional and our technicians could not fully test/evaluate. It has been priced accordingly. It is possible that an experienced user could replace the laser, test/troubleshoot/repair further, and make this unit fully functional again. Or this unit could be used as a parts unit for another Model 1010 Laser Imaging System.

View Photo of the first group of accessories included with this unit.
View Photo of the cable accessories.
View Photo of the cooler air unit.
View Photo of the monitor for the unit.
View Photo of the Sony Color Video Monitor and Printer.

Input Voltage: 208 VAC, 20 A, Single Phase, 50/60 Hz

Ferraz Shawmut A30QS400-4IL Semiconductor Protection Fuse
Configuration:
• Fuse: Amp-Trap
• Rated Volts: 300
• Style: QS
• Amperes: 400
(...)
• Mounting Type: Blades, Bolt-In
• Integral Blown-Fuse Indicator: Trigger Actuator

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