KLA Tencor / Ultrapointe PMT-000276 Preamp and Assembly
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KLA Tencor / Ultrapointe PMT-000276 Preamp and Assembly



Part Number: 000276
Daughter Card Part Number: 001023




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Stock # 63500-33
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KLA Tencor CRS-3000 and CRS-3100 Optical Review System

Features
  • 325 nm Laser and White Light Optical System
  • Four White Light Objectives 5x, 50x, 100, and 150x
  • 325nm 100x UV Objective
  • High-Resolution Color CCD Camera
  • 24-bit Integrated White Light Package
  • Precision XYZ Stage
  • Automatic Deskew
  • Dual Pentium PC with Jaz Drive
  • Auxillary 13 Inch Video Monitor
  • NFS SW Interface for Ethernet
  • Tencor File Format Interface
  • KLARF Format Interface
  • Integrated Mini-Environment
  • Exhaust Blower With Interconnect Ducts
  • 300mm Wafer Handler with Integrated 300mm Asyst Loadports and Hermos Carrier ID readers
  • SEMI Communication/Automation Standards: E84, E87, E40, E90 and E94
  • GEM/SECS 232 (SEMI-E4, E5 and E30)
  • Impact ADC option

Description

The KLA-Tencor Confocal Review Station (CRS) is an automated laser/white light microscope system used for classification of defects on both bare and patterned wafers, using defect maps generated by a variety of instruments. The CRS combines a brightfield/darkfield white-light microscope with a laser confocal microscope, automated wafer handling, and controlling software.

The CRS can display any combination of a 2D focal plane image, a 3D surface image rotated to any orientation, any horizontal slice of a volume image, and vertical 2D cuts through any of the 3D images in XZ or YZ planes. The laser scan amplitude can vary for 1x, 2x, 4x, or 8x zoom within the same magnification of the microscope, providing on-screen magnification up to 20,000x with a 100x objective at Zoom level 8.

An important feature of the confocal microscope is its extremely narrow depth of focus in laser light, which makes it possible to view images of individual layers in semiconductor structures, and to resolve structural and defect features as small as 0.15 µm.

The CRS can be configured from fully manual operation to fully automated operation. There are manual and automatic options for cassette loading, wafer loading, deskew, defect inspection and analysis, image capture, data storage, and communication. The CRS can run automatically using locally stored recipes, or can receive commands and respond to them over a network.


Product Family: KLA-Tencor CRS-3100, KLA Tencor CRS 3100, KLA-Tencor CRS3100, KLA Tencor CRS3100, KLA CRS-3100, KLA CRS 3100, KLA CRS3100, Tencor CRS-3100, Tencor CRS 3100, Tencor CRS3100, CRS-3100, CRS3100, KLA-Tencor CRS-3000, KLA Tencor CRS 3000, KLA-Tencor CRS3000, KLA Tencor CRS3000, KLA CRS-3000, KLA CRS 3000, KLA CRS3000, Tencor CRS-3000, Tencor CRS 3000, Tencor CRS3000, CRS-3000, CRS3000


Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.


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Specifications

External Frame
Cleanliness Class 1
Particle Generation <0.01 each of >0.3 µm added per 1 cm² per wafer pass in Class 1 environment
External Panels Stainless Steel
Air Flow Cleanroom Laminar Air
Vibration Isolation 3-point Active Air Damping & Leveling
Frame Plated Mild Steel; Inert Gas-welded Construction
Support Transport: 3-inch Textite Wheels (4); Operation: 2.5-inch Leveling Pads (4)
Controls On/Off, Emergency Off, Circuit Breakers, Laser Interlock System
Throughput based on 8-inch Wafers
Load Wafer to 1st Deskew Point1 28 s
Manual Deskew to 1st Defect 15 s
AutoDeskew : 2 point 20 s
Move & Focus 2.4 s (live laser mode, 8 mm travel)
Unload Wafer 13 s
Image Acquisition 5.5 s (512 × 512 × 64)
Image Display (512 × 512 × 64) 2 s
Image Storage (512 × 512 × 64) Surface Image:0.1 s
Volume Image:4.0 s
Facilities
Electrical - Main System AC 240/220/208/200 V, 1ø, 30 A @ 208 V
Air 80 psi, 3 scfm
Vacuum 20 in. Hg, 0.5 scfm


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Item Images

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KLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review System
KLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review System
KLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review System
KLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review System
KLA Tencor CRS-3000 and CRS-3100 Optical Review SystemKLA Tencor CRS-3000 and CRS-3100 Optical Review System
Shipping Crates


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Manuals, Datasheets, Drivers, Links

Kimmon He-Cd Laser Datasheet (pdf)  
Link to KLA Tencor / Ultrapointe Website 


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