---
type: product
schema_version: 1
stock_number: "63500-70"
canonical_url: "https://www.artisantg.com/TestMeasurement/63500-70/KLA-Tencor-CRS-3100-Power-Supply"
json_url: "https://www.artisantg.com/TestMeasurement/63500-70/KLA-Tencor-CRS-3100-Power-Supply.json"
generated_at: "2026-11-07T07:54:08.860Z"
last_updated: "2026-10-24T08:25:40.923-05:00"
---

# KLA Tencor CRS-3100 Power Supply

_Summary and Categories are this item's record. The description sections and FAQ are machine-assisted and can contain errors; where they disagree with the record, the record is correct, and where description sections disagree with each other, Details wins._

## Summary

- Manufacturer: KLA Tencor
- Model: CRS-3100
- Condition: Used and in Excellent Condition
- Price: $1,350.00 USD
- Availability: In stock, 1 available
- Warranty: 1-Year Warranty with 30-Day Return Guarantee
- ITAR restricted: No
- Shipping weight: 15 lb, estimated
- Shipping dimensions: 24X18X12 in, estimated

## Categories

- Industrial Systems Equipment > Power Supplies (primary)
- Semiconductor > Semiconductor

## Details

### Configuration

- Outlet Strip, 120 VAC
- J103 Laser Power Supply, 200-240 VAC
- J109 Stage Controller, 200 - 240 VAC
- P108 Connector
- Option J111 SGI UPS Power, 120 VAC
- J106 AUX1, 115 VAC
- P111 Workstation Input Power, 120 VAC
- J104 External Exhaust, 200-240 VAC
- J102 AUX Interlock Connector

Input Voltage: 240 VAC

## Images

- <https://www.artisantg.com/itemimages/kla_tencor_crs_3100_view1_2016223105148.jpg>
- <https://www.artisantg.com/itemimages/kla_tencor_crs_3100_view2_2016223105148.jpg>
- <https://www.artisantg.com/itemimages/kla_tencor_crs_3100_view3_2016223105148.jpg>
- <https://www.artisantg.com/itemimages/kla_tencor_crs_3100_view4_2016223105148.jpg>