Keysight / Agilent 10898A Dual Laser-Axis Board

Keysight / Agilent 10898A Dual Laser-Axis Board

• IEEE Front Panel

Part Number: 10898-60002

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CE labeled RoHS Compliant
We typically stock RoHS compliant / CE marked equipment for this Keysight / Agilent 10898A.
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Stock # 63596-1
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Keysight / Agilent 10898A Dual Laser-Axis Board

  • Resolution to 0.31 nm
  • 2.7 m/s Plane Mirror Slew Rate Capability
  • Sub-Nanosecond Variable Data Age
  • 5 MHz Dual-Channel Data Transfer


The Agilent 10898A Dual Laser Axis Board provides the same resolution of the 10897B High Resolution Laser Axis Board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer the premium positioning repeatability and accuracy for advanced products such as IC fabrication equipment. Like its predecessor the 10897B, the 10898A provides measurement resolution to (/2048 (0.3 nm) with the high resolution plane mirror interferometer.

Product Family: 10898A, 10898 A, 10898-A

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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Agilent / HP 10898A Dual Laser-Axis Board

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