Keysight / Agilent 10897B High Resolution Laser Axis Board

Keysight / Agilent 10897B High Resolution Laser Axis Board

Part Number: 10897-60002

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CE labeled RoHS Compliant
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Stock # 65744-2
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Keysight / Agilent 10897B High Resolution Laser Axis Board

  • High Resolution
  • 10 MHz Data Transfer
  • Low Variable Data Age


The Agilent / HP 10897B High Resolution Laser Axis Board provides an improved position resolution whgen compared to previous laser systems and low noise offer the ultimate positioning repeatability and accuracy for advanced products such as IC fabrication equipment. The Agilent 10897B provides measurement resolution up to 0.3 nm (3 Angstroms).

The 10897B is tested at frequencies equivalent to 700 mm/s plane mirror slew rates, double that of the 10897A. To provide unsurpassed positioning accuracy for dynamic measurements, the 10897B provides dramatically reduced data age ambiguity compared with previous Agilent systems. Data age ambiguity, the unknown variation in data age, has been reduced to less than 1 ns. This provides high accuracy when compensating moving systems for the delay between the position measurement and the time the position information is available. This improved dynamic accuracy is especially important for E-beam machines and step and scan IC fabrication cameras.

The 10897B contains an onboard, low-pass filter which may be enabled to provide more stable operation in low signal-tonoise conditions. This filter is programmable to provide the most stable positioning for your specific application. The 10897B High Resolution Laser Axis Board is a register-programmed position axis board that provides a 36-bit position word in fractional wavelengths. The position word is readable over the VMEbus and is also available from a real-time hardware output on the A and C rows of the P2 connector. The 10897B offers very high data rates to provide high bandwidth, high-performance closed-loop positioning for critical applications.

Product Family: 10897, 10897A, 10897B, 10897C, 10897 B, 10897-B

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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Agilent / HP 10897B High Resolution Laser Axis Board

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