Advanced Energy MDX-5K DC Magnetron 5 kW Power Supply
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Advanced Energy MDX-5K DC Magnetron 5 kW Power Supply

Input Voltage: 208 VAC, 3 Phase

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Stock # 71507-1
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Advanced Energy MDX Series DC Magnetron Drives

  • Magnetron Sputtering
  • Cathodic Arc Deposition
  • DC Biasing
  • 500 W to 80 kW


The Advanced Energy MDX Series DC Magnetron Drives use a high-frequency conversion technique to provide tight regulation, high conversion efficiency, and low stored energy at the output. using micro-processor control and a modular design, they are easy to use, maintain, and repair.

MDX power supplies provide reliable power for continuous hard use in a vacuum environment. As the industry leader, they are most commonly used as dc magnetron sputtering drives, delivering tight regulation, superior arc quenching, and low stored output energy. They are also well-suited as high-power bias supplies in hard-coat systems and RF sputtering and etching systems.

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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MDX Series
Power Output From 5 kW to 80 kW in 5 kW increments
Regulation 0.25% in all modes: power, current, voltage
Ripple 5 kW unit is 5% rms at 50 kHz; all others are 1% rms at 100 kHz
Ignition Voltage 1550 V
Ramp Timer 0 to 99.0 minutes, programmable
Run Timer Continuous or 0 to 99.0, programmable
Load Mismatch Continuous operation into any load mismatch. Automatic limiting occurs when current, voltage, or power exceed factory-set limits
Input Voltage 208 V, 380 V, 415 V ± 10%, 3 phase, 50 / 60 Hz regardless of phase rotation
Cooling Forced air; maximum ambient temperature is 45°C, 92% relative humidity, noncondensing. Free airflow must be provided.
Power Output Connector UHF Type

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Advanced Energy MDX Series DC Magnetron DrivesAdvanced Energy MDX Series DC Magnetron DrivesAdvanced Energy MDX Series DC Magnetron Drives
Advanced Energy MDX Series DC Magnetron Drives

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