MKS Instruments 1479 Series Mass Flow Controllers
  • mks_massflo_1479_series_view2
  • mks_massflo_1479_series_view1
  • mks_massflo_1479_series_view3
  • mks_massflo_1479_series_view4

MKS Instruments 1479 Series Mass Flow Controllers

Features

  • Patented Sensor Design Provides Exceptional Zero Stability
  • Full Scale Flow Ranges from 10 SCCM to 20 SLM for Precise and Repeatable Flow Measurement and Control
  • Percent of Full Scale Accuracy for Analog Configurations
  • MTBF Analysis and STRIFE Testing to Ensure Long Term Performance
  • < 10 RA Electropolish Finish of Wetted Stainless Surfaces
  • CE Mark Compliant

View our selection of these items below.


Have a quote from somewhere else? Click Here




Contact Us
Share:



This MKS Instruments CB259-5-10 3 Meter Cable is used and in excellent condition.



Stock # 66356-4




This MKS Instruments 1479A51CS1BM Mass Flow Controller is used and in excellent condition.

Configuration:
• Gas: N2
• Range: 50 sccm
• Maximum Inlet Pressure: 150 psig
• Warm-up Time: Max. 2 minutes
• Output Impedance: < 1="" ohm="" />



Stock # 72554-5




This MKS Instruments 1479A12CS1BM Mass Flow Controller is used and in excellent condition.

Configuration:
• Gas: N2
• Range: 100 sccm
• Maximum Inlet Pressure: 150 psig
• Warm-up Time: Max. 2 minutes
• Output Impedance: < 1="" ohm="" />



Stock # 72554-6




This MKS Instruments 1479A13CS1BM Mass Flow Controller is used and in excellent condition.

Configuration:
• Gas: N2
• Range: 1000 sccm
• Maximum Inlet Pressure: 150 psig
• Warm-up Time: Max. 2 minutes
• Output Impedance: < 1="" ohm="" />



Stock # 72554-7



  • Description
  • Tech Specs
  • Datasheets / Manuals 
Contact Us
Share:

Description

The MKS 1479 Series Mass Flow Controllers are an economical metal-sealed mass flow controller designed to measure and control the flow of gases in high purity applications. The Type 1479 Mass-Flo® Controller is available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. The 1479 can also be used as a pressure controller when connected to a suitable pressure transducer.

The 1479 Series is a direct form-ft-function replacement for the most common MFC’s on the market today. The standard 3-inch footprint enables the 1479 to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same PC card edge or Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1479 is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Product Family: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm
Contact Us
Share:

Specifications

Contact Us
Share:

Resources

Manuals, Datasheets, Drivers, Links

MKS 1479 Series Datasheet (pdf) 
Link to MKS Instruments Website