MKS Instruments / ENI GEW-30A Genesis RF Plasma Generator

MKS Instruments / ENI GEW-30A Genesis RF Plasma Generator



This MKS Instruments / ENI GEW-30A Genesis RF Plasma Generator is used and in excellent condition.

Configuration:
• RF Output: 3000 W
• Frequency: 40.68 MHz
• Advanced Energy Pinnacle 300 Mounting Bracket
• Asco Red Hat II 8210G1
• 600V Cable

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View Photo of 600V Cable




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Stock # 74750-1
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MKS Instruments / ENI Genesis Series RF Plasma Generators

Features
  • ±1% Accuracy
  • High RF Stability
  • Repeatable Performance
  • Wide Range of Power and Frequencies

Description

MKS Instruments / ENI Genesis Series RF Plasma Generators feature high power density, exceptional stability, generous power margins and excellent reliability. The generator’s ±1% accuracy is tied to and transferable from the United States National Institute of Standards. Response time to power set point changes and process transitions is 500µS. The result is advanced RF plasma generation and control for low cost and high yield in the most demanding thin film processing applications.

The Genesis series is a platform of RF plasma generators with a wide range of power and frequencies for a variety of plasma deposition and removal applications. DSP-based power control ensures power accuracy for RF stability, repeatable performance and high yield.


Product Family: Genesis, GEW-30A, GEW30A


Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.


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MKS Instruments / ENI Genesis Series RF Plasma GeneratorsMKS Instruments / ENI Genesis Series RF Plasma GeneratorsMKS Instruments / ENI Genesis Series RF Plasma Generators
MKS Instruments / ENI Genesis Series RF Plasma Generators


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