Comdel ESC Series Electrostatic Chuck Power Supplies
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  • comdel_esc_2_view2_2018111194433
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Comdel ESC Series Electrostatic Chuck Power Supplies

Features

  • Reduced Risk of Permanent Charge on Chuck Through output Polarity Reversal
  • Low Stored Energy and Built-In Current Limitations to Safeguard from Surges and Arcs
  • Short Circuit and Open Circuit Proof Design for Enhanced Reliability
  • Built in RF Filtering

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Input Voltage: 24VDC

Input Voltage connector a little loose. It does not affect functionality.

Part Number: FP6251RC



Stock # 98435-2



  • Description
  • Tech Specs
  • Datasheets / Manuals 
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Description

Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight supplies come complete with NRTL product safety marks, built in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications. The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.
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Specifications

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Resources

Manuals, Datasheets, Drivers, Links

Comdel ESC-2 Datasheet (pdf) 
Link to Comdel Website