Comdel ESC Series Electrostatic Chuck Power Supplies
  • comdel_esc_2_view1_2018111194433
  • comdel_esc_2_view2_2018111194433
  • comdel_esc_2_view3_2018111194433
  • comdel_esc_2_view4_2018111194433

Comdel ESC Series Electrostatic Chuck Power Supplies


  • Reduced Risk of Permanent Charge on Chuck Through output Polarity Reversal
  • Low Stored Energy and Built-In Current Limitations to Safeguard from Surges and Arcs
  • Short Circuit and Open Circuit Proof Design for Enhanced Reliability
  • Built in RF Filtering

View our selection of these items below.

Have a quote from somewhere else? Click Here

Contact Us

Input Voltage: 24VDC

Input Voltage connector a little loose. It does not affect functionality.

Part Number: FP6251RC

Stock # 98435-2

  • Description
  • Tech Specs
  • Datasheets / Manuals 
Contact Us


Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight supplies come complete with NRTL product safety marks, built in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications. The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.
Contact Us


Contact Us


Manuals, Datasheets, Drivers, Links

Comdel ESC-2 Datasheet (pdf) 
Link to Comdel Website