Rudolph Technologies A11188 Ellipsometer Check Sample Standard
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Rudolph Technologies A11188 Ellipsometer Check Sample Standard

• Nominal SiO2 Thickness: 2300 Å
• Reference Index:1.462 FXD
• Measure Routine: 2
• Calculation Routine: 11

Part Number: A11188-11

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Stock # 99236-1
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Rudolph Technologies AutoEL III Automatic Ellipsometer

  • Automatic Measurement of Double Layer Transparent Films
  • Non-Volatile Memory
  • Autocollimator Microscope


The Rudolph Technologies AutoEL III Automatic Ellipsometer features automatic measurement of double-layer transparent films which extends the capability to thickness and refractive index measurements of double layer transparent films such as nitrides over oxides and to the measurement of the optical constants of bare substrates such as silicon, gallium arsenide or gallium arsenide phosphide with direct readout of N and K.

The AutoEl III also features non-volatile memory which stores frequently used program specifications and input data. Stored information can be recalled by pressing one button. This feature of the AutoEL III has the ability to handle complex multilayer measurements while retaining simplicity of operation.

The AutoEL III also has an autocollimator/microscope design which permits accurate sample alignment as well as clear and easy viewing of areas of interest on patterned wafers. These features are essential to measurement accuracy particularly when samples are not perfectly flat and where the precise location of areas to be measured is critical.

Product Family: A11188, AIII88

Important Notice: Please note that any additional items included with this equipment such as accessories, manuals, cables, calibration data, software, etc. are specifically listed in the above stock item description and/or displayed in the photos of the equipment. Please contact one of our Customer Support Specialists if you have any questions about what is included with this equipment or if you require any additional information.

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Rudolph Technologies AutoEL III Automatic EllipsometerRudolph Technologies AutoEL III Automatic EllipsometerRudolph Technologies AutoEL III Automatic Ellipsometer

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Manuals, Datasheets, Drivers, Links

Rudolph Technologies AutoEL III Datasheet (pdf) 
Link to Rudolph Technologies Website 

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