370 MKS Instruments Stabil-Ion Controller Display

MKS Instruments 370 Stabil-Ion Controller Display Overview

Features:

• All-Metal, Rack-Mount Controller for Stabil-Ion and Convectron Vacuum Gauges is Noise-Immune
• Flexible Design Allows for Optional Set Point Relays and Digital Interfaces
• Three-Digit Display of Pressure Measurements

The MKS Instruments 370 Stabil-Ion Controller Display may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Stabil-Ion Controller Display Price & Specs

MKS Instruments 370 Stabil-Ion Controller Display Description

Functions

Powers and operates a single Stabil-Ion Bayard-Alpert ionization gauge for high-vacuum and ultra-high vacuum pressure measurement. The controller provides a digital display, a log-linear analog output, and an RS-232/485 serial interface for data acquisition and remote control. Integrated process control is enabled through multiple user-programmable set-point relays for system interlocking. The unit supports gauge degas functionality and connects to the gauge head via a multi-pin cable, typically for use in semiconductor processing, PVD, and surface science systems.

Platforms

This unit precisely measures vacuum pressure from 10-2 to 10-10 Torr by controlling and powering a hot-cathode ionization gauge. It interfaces with the gauge via a dedicated cable and provides analog (0-10V/4-20mA) and digital (RS-232/485) outputs for system integration. Process control is enabled via relay setpoints. It functions as an integral part of high-vacuum (HV) and ultra-high-vacuum (UHV) systems in semiconductor processing, thin-film deposition, and scientific research, often rack-mounted or benchtop.

Applications

Controls and monitors ionization vacuum gauges for high vacuum pressure measurement in semiconductor processing, thin film deposition, mass spectrometry, and surface analysis systems. Provides analog and digital outputs for process control integration, setpoint relay control for automated vacuum system sequencing, and real-time pressure display with logarithmic scaling. Interfaces with hot cathode and cold cathode ionization gauges via high voltage cable connections. Enables contamination-free vacuum measurement in UHV chambers, load locks, and transfer chambers requiring precise pressure monitoring from 10^-2 to 10^-11 Torr range.

Accessories

Requires the 370 Main Controller chassis/backplane unit for operation. Interfaces include a DB-15 D-sub female connector for sensor input, a DB-9 D-sub female for serial communications, and a 25-pin D-sub for control outputs. The display is integral to the controller front panel and connects internally. No external adapters are typically needed.

Interfaces

DB-9 female connector for remote interface, BNC female connector for ion gauge, BNC female connector for vacuum gauge, 15-pin D-sub female connector for power supply, RS-232 serial port.

Specifications

Digital vacuum gauge controller that displays pressure readings and provides control interfaces for vacuum systems. Features RS-232/RS-485 communication, relay setpoints for process control, and analog outputs for data logging. Compatible with various Stabil-Ion and other vacuum gauges, enabling measurement across wide pressure ranges from UHV to atmosphere. Supports multiple gas calibration factors and provides diagnostic information. Used in semiconductor manufacturing, research laboratories, and industrial vacuum applications for precise pressure monitoring and system automation.

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MKS Instruments 370 Stabil-Ion Controller Display Manuals, Datasheets, Drivers, Links

• MKS Instruments 370 Series Datasheet (pdf)
• MKS Instruments 370 Series Manual (pdf)
• View all MKS Instruments products

MKS Instruments 370 Stabil-Ion Controller Display Specs

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