370101 MKS Instruments Stabil-Ion Power Supply

MKS Instruments 370101 Stabil-Ion Power Supply Overview

Features:

• All-Metal, Rack-Mount Controller for Stabil-Ion and Convectron Vacuum Gauges is Noise-Immune
• Flexible Design Allows for Optional Set Point Relays and Digital Interfaces
• Three-Digit Display of Pressure Measurements

The MKS Instruments 370101 Stabil-Ion Power Supply may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Stabil-Ion Power Supply Price & Specs

MKS Instruments 370101 Stabil-Ion Power Supply Description

Functions

High-voltage DC power supply designed to provide stable, regulated output for ionization gauges and vacuum measurement systems. Delivers precise voltage control with low ripple and noise characteristics essential for accurate pressure measurements in high and ultra-high vacuum environments. Features adjustable output voltage ranges, current limiting protection, and monitoring capabilities. Interfaces with vacuum controllers and measurement systems through analog and digital communication protocols. Includes safety interlocks and fault detection circuitry. Commonly applied in semiconductor manufacturing, thin film deposition, mass spectrometry, and research vacuum systems requiring reliable ion gauge operation and precise vacuum level monitoring.

Platforms

A half-rack, rack-mountable chassis for benchtop use or system integration. Local operation is via a front-panel digital display and keypad. It interfaces with one Bayard-Alpert ionization gauge and up to two Convectron gauges. Remote integration is supported through a rear D-sub connector providing a logarithmic 0-10VDC analog output, two process control relays, and remote I/O. An RS-232/RS-485 serial port enables digital communication with a host computer or PLC for remote operation and data logging.

Applications

Functions: Powers and controls ion gauges, providing stable filament emission current and regulated voltages for accurate pressure measurement. Hardware Platform: Vacuum instrumentation systems, typically integrated with vacuum chambers and process control systems. Interfaces: Connects to ion gauge tubes via dedicated cables, interfaces with control systems via analog or digital signals for pressure readout and control. Applications: Vacuum pressure measurement in semiconductor processing, research, and analytical instrumentation.

Accessories

Stabil-Ion controller, remote interface cable, input power cable, high voltage output cable. Interfaces: RS-232, Ethernet (RJ45), analog I/O (BNC), high voltage output (SHV). Connectors: DB-9 (RS-232), RJ45 (Ethernet), BNC (analog I/O), SHV (high voltage).

Interfaces

RS-232 serial interface 9-pin D-sub connector for remote control and monitoring. Analog voltage control input BNC connector 0-10V. Analog current monitor output BNC connector. High voltage output SHV connector rated for kilovolt operation. AC power input IEC 320 C14 inlet. Interlock safety connector 15-pin D-sub for external safety systems. Ground terminal binding post for chassis grounding.

Specifications

The power supply delivers regulated high voltage DC output specifically designed for ion gauge operation in vacuum measurement systems. Features precise voltage regulation with low ripple and noise characteristics to ensure stable ionization current measurement. Incorporates current limiting protection circuits and remote control capabilities for integration with vacuum controllers and automated systems. Designed for rack mounting in instrumentation environments with standard analog and digital interface connections. Compatible with various ion gauge tubes including Bayard-Alpert and hot cathode configurations for pressure measurement in high and ultra-high vacuum applications.

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MKS Instruments 370101 Stabil-Ion Power Supply Manuals, Datasheets, Drivers, Links

• MKS Instruments 370 Series Datasheet (pdf)
• MKS Instruments 370 Series Manual (pdf)
• View all MKS Instruments products

MKS Instruments 370101 Stabil-Ion Power Supply Specs

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