247D MKS Instruments Four Channel Power Supply / Readout

MKS Instruments 247D Four Channel Power Supply / Readout Overview

Features:

• Provide Power and a Set Point Signal
• Readout of Gas Flow
• Gas Correction Potentiometer
• Remote Indicating, Recording and Controlling

The MKS Instruments 247D Four Channel Power Supply / Readout may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Four Channel Power Supply / Readout Price & Specs

MKS Instruments 247D Four Channel Power Supply / Readout Description

Functions

Four-channel power supply and readout device for mass flow controllers/meters, featuring 3½-digit Digital Panel Meter (DPM), 0-5 VDC signal inputs, gas correction factor scaling, external setpoint and ON/OFF control capabilities, and dual signal output modes (scaled 0-2 VDC). Provides sequential display selection, TTL-compatible external control, and rear panel adjustment for gas correction factors.

Platforms

Designed for integration in laboratory and industrial gas flow control systems, the device operates within electronic instrumentation racks and interfaces primarily with MKS analog mass flow controllers and meters through 0-5 VDC analog signals. It supplies ±15 VDC power to four channels, each providing signal conditioning, set point control, and flow readout via a sequenced 3½-digit Digital Panel Meter (DPM). Communication and control are achieved through manual front panel controls, external 0-5 VDC set point inputs, and TTL-compatible ON/OFF signals. It supports gas correction scaling on the rear panel and can be integrated into larger process control systems using standard interface cables. Typical applications include multi-gas flow monitoring, set point control, and ratioed gas mixing in vacuum and semiconductor processing environments.

Applications

This equipment is typically used in vacuum processing applications, semiconductor manufacturing, and laboratory research environments. It provides power and readout functions for mass flow controllers and meters, enabling precise control and monitoring of gas flow rates. Its multiple channels and compatibility with external set points make it suitable for sophisticated flow management systems requiring accurate scaling and signal output adjustments.

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MKS Instruments 247D Four Channel Power Supply / Readout Manuals, Datasheets, Drivers, Links

• MKS Instruments Type 246/247/647 Datasheet (pdf)
• MKS Instruments Type 247 Configuration Datasheet (pdf)
• MKS Instruments Type 247D Datasheet (pdf)
• MKS Instruments 246C Manual (pdf)
• View all MKS Instruments products

MKS Instruments 247D Four Channel Power Supply / Readout Specs

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