CMH4-M11S06-EMC Entegris Diaphragm Gauge Manometer

Entegris / Mykrolis / Millipore / Tylan General CMH4-M11S06-EMC Diaphragm Gauge Manometer Overview

Features:

• 9-Pin J1 Communications Port
• Various Torr Pressure Options
• Interchangeable Fittings

The Entegris CMH4-M11S06-EMC Diaphragm Gauge Manometer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Diaphragm Gauge Manometer Price & Specs

Entegris / Mykrolis / Millipore / Tylan General CMH4-M11S06-EMC Diaphragm Gauge Manometer Description

Platforms

A temperature-controlled capacitance diaphragm transducer designed for high-accuracy, absolute pressure measurement in vacuum systems. It integrates into high-purity gas delivery manifolds or process chambers via a 3/8-inch VCR male fitting. The device interfaces with PLCs or readout units through a 9-pin D-sub connector, requiring +/-15 VDC power and providing a 0-10 VDC analog output proportional to pressure. Primarily used in semiconductor fabrication (CVD, PVD, etch), vacuum coating, and other industrial processes requiring precise, gas-composition-independent pressure control.

Applications

Measures absolute pressure in vacuum and low-pressure applications using a flexible diaphragm that deflects proportionally to applied pressure differential. Capacitive or strain gauge sensing elements detect diaphragm displacement, converting mechanical movement to electrical signals. Operates in semiconductor processing equipment, chemical vapor deposition systems, and ultra-high purity gas delivery lines. Interfaces via analog voltage outputs (0-10V), current loops (4-20mA), or digital protocols including DeviceNet, Profibus, and RS-485. Provides real-time pressure monitoring for process control, leak detection, and system diagnostics. Commonly deployed in wafer fabrication facilities for monitoring process chamber pressures, gas panel pressures, and vacuum pump performance in reactive ion etching, physical vapor deposition, and atomic layer deposition tools.

Accessories

Analog Output cable assembly. Includes a 9-pin D-sub male connector for signal output and a 9-pin D-sub female connector for daisy-chaining.

Interfaces

1/4" VCR male inlet connection, 4-20mA analog output signal, 9-pin D-sub connector for electrical interface, 24VDC power input requirement, EMC compliance certification for electromagnetic compatibility, stainless steel wetted surfaces compatible with corrosive gases, absolute pressure measurement range typically 0-1000 Torr

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Entegris / Mykrolis / Millipore / Tylan General CMH4-M11S06-EMC Diaphragm Gauge Manometer Manuals, Datasheets, Drivers, Links

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Entegris / Mykrolis / Millipore / Tylan General CMH4-M11S06-EMC Diaphragm Gauge Manometer Specs

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