More Information
Features:
- 9-Pin J1 Communications Port
- Various Torr Pressure Options
- Interchangeable Fittings
The Entegris CMH4 Series Diaphragm Gauge Manometers feature a 9-pin J1 communications port and a wide variety of Torr pressure options. These manometers can be interchanged with a variety of fittings to suit the individual user's needs.
The CMH4-M11S06 Entegris Diaphragm Gauge Manometer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).
Functions
Measures and displays gas pressure via a diaphragm sensor. Provides a 0-10 VDC analog output proportional to pressure. Compatible with various gases. Used for pressure monitoring and control in gas delivery systems.
Applications
A diaphragm gauge manometer utilizing capacitance sensing technology to measure pressure and vacuum in semiconductor manufacturing environments. It measures absolute pressure by detecting deflection of a metal diaphragm relative to a fixed electrode. Designed for integration into gas delivery systems, vacuum chambers, and process tools via an electrical interface that outputs analog voltage signals proportional to measured pressure. Compatible with aggressive gases and high-purity applications, featuring corrosion-resistant wetted materials and hermetic sealing to prevent contamination in ultra-clean processes.
This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.
Entegris CMH4-M11S06 Diaphragm Gauge Manometer Specs
General |
Manufacturer | Entegris / Mykrolis / Millipore / Tylan General |
Model | CMH4-M11S06 |
Condition | Used and in Good Condition |
Product Family | CMH4 Series |
Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for Entegris. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.
Diaphragm Gauge Manometer Price & Specs