253B-32263 MKS Instruments Exhaust Throttle Valve

MKS Instruments 253B-32263 Exhaust Throttle Valve Overview

Features:

• Butterfly/Throttle Valve
• 316L S.S. Exposed Material
• 1.7 sec. (Open to Close) Valve Speed

The MKS Instruments 253B-32263 Exhaust Throttle Valve may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Exhaust Throttle Valve Price & Specs

MKS Instruments 253B-32263 Exhaust Throttle Valve Description

Functions

High-precision throttle valve for controlling exhaust gas flow in vacuum systems. Features butterfly-type valve design with pneumatic actuator for automated pressure control. Interfaces with process controllers via analog/digital signals for closed-loop pressure regulation. Provides conductance modulation between process chamber and vacuum pump to maintain desired chamber pressure. Commonly used in semiconductor processing, thin film deposition, and plasma etching applications where precise pressure control is critical. Compatible with corrosive gases and operates in high-vacuum to atmospheric pressure ranges.

Platforms

The Exhaust Throttle Valve, designed for vacuum pressure control, features a pneumatically actuated mechanism. It is typically constructed from corrosion-resistant materials like stainless steel and utilizes a poppet or butterfly design for precise conductance adjustments. Communication and control are enabled via digital or analog signals, and the valve integrates with vacuum systems through standardized flange interfaces such as NW/KF or CF. Common applications involve pressure regulation in semiconductor fabrication, thin-film deposition, and other vacuum processes.

Accessories

Required accessories include a MKS 653B/663B/670 controller for power and command signals, connected via a 15-pin D-sub male-to-female cable for analog I/O and a 5-pin M12 male-to-female Mini-Change cable for DeviceNet digital communication. The controller requires an IEC C13 AC power cord. The valve itself integrates a vacuum flange (e.g., ISO-KF, CF), a 15-pin D-sub female, and a 5-pin M12 male Mini-Change connector.

Interfaces

DN40KF/NW40 vacuum flange inlet and outlet connections, 24VDC motor control with 15-pin D-sub connector for power and control signals, 0-10VDC analog position command input, position feedback output, limit switch outputs for fully open/closed indication, RS-232/RS-485 serial communication interface via 9-pin D-sub connector for digital control and diagnostics, pneumatic pilot port with 1/4" Swagelok fitting for optional pneumatic actuation, requires MKS Type 651C or compatible valve controller for operation, mounting bracket with four M6 threaded holes for horizontal or vertical installation

Specifications

Pneumatically actuated butterfly valve designed for precise conductance control in vacuum exhaust lines. Features stainless steel construction with elastomer seals for corrosive gas compatibility. Operates via compressed air actuation (80-100 PSI) with fail-safe position capability. Integrates with vacuum system controllers through analog position feedback (0-10V) and command input signals. Mounts between ISO/NF flanges using centering rings and clamps. Communicates valve position and status through discrete I/O interfaces. Primary applications include semiconductor process chamber pressure control, load-lock venting regulation, and turbo pump isolation in thin film deposition, etching, and CVD systems.

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MKS Instruments 253B-32263 Exhaust Throttle Valve Manuals, Datasheets, Drivers, Links

• MKS Instruments 253B Series Datasheet (pdf)
• View all MKS Instruments products

MKS Instruments 253B-32263 Exhaust Throttle Valve Specs

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