835500-U3 MKS Instruments Vacuum Quality Monitor Controller
Request a Quote
Get a formal quote for this item, including volume pricing and PO terms.
Item details
| Part Number | 835500-U3 |
|---|---|
| In Stock | 1 |
| Available | Today |
| Location | Champaign, IL USAships worldwide |
| Stock # | 95019-1 |
| Ship Weight | 12 lbs /ea |
| Condition | Used and in Excellent Condition |
| Inspection | Before every shipment |
| Warranty | 1-Year Warranty with 30-Day Return Guarantee |
Description
• Mounting: Benchtop
• USB: 2.0
• AMU: 1-300 (180 Resolution)
Click anywhere or press Esc to close
1 / 42 / 43 / 44 / 4That idle equipment in your warehouse could be cash.
Government & Enterprise Buyers: volume pricing, POs and government purchasing.
Government SalesWrite a Review
Share your experience with this item to help other buyers.
Make an Offer
Submit Your Offer, We’re Here to Assist! If we find your offer reasonable our dedicated customer service team will get back to you.
Request More Information
Have a question about this item? Send us a message and a specialist will follow up.
Thank You!
We have received your InstraView Request and will be contacting you shortly.
More Information
MKS Instruments / Granville-Phillips 835500-U3 Vacuum Quality Monitor Controller Overview
Features:
- Highest Performance Gas Analysis Technology
- Outstanding Instrumentation Functional Design that Transforms Complex Measurement into Actionable Information
- Data Collection, Spectral Decomposition, and Data Logging Over the Full 1-300 amu Measurement Range
The VQM System is a mass spectrometer consisting of an Autoresonant Ion Trap Mass Spectrometry (ART MS) Gauge (hereafter referred to as the MS Gauge), the VQM Controller, an interconnect cable, a communications interface for user-application development, and a VQM Viewer Software application. The MS Gauge mounts directly onto any standard 2.75" ConFlat port of a vacuum chamber. All of the internal components of the MS Gauge reside in the vacuum space where the gas analysis measurements are performed.
The MKS Instruments 835500-U3 Vacuum Quality Monitor Controller may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).
Vacuum Quality Monitor Controller Price & Specs
MKS Instruments / Granville-Phillips 835500-U3 Vacuum Quality Monitor Controller Description
Functions
Vacuum system monitoring and control through residual gas analysis using quadrupole mass spectrometry technology. Provides real-time measurement and identification of gas species in vacuum chambers with mass-to-charge ratio detection from 1-300 AMU at 180 resolution. Features USB 2.0 interface for digital communication and data logging. Operates as benchtop controller for vacuum quality assessment, leak detection, process monitoring, and contamination analysis in semiconductor manufacturing, research laboratories, and thin-film deposition systems.
This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.
MKS Instruments / Granville-Phillips 835500-U3 Vacuum Quality Monitor Controller Manuals, Datasheets, Drivers, Links
MKS Instruments / Granville-Phillips 835500-U3 Vacuum Quality Monitor Controller Specs
| General | |
|---|---|
| Manufacturer | MKS Instruments |
| Model | 835500-U3 |
| Condition | Used and in Excellent Condition |
| Product Family | 835 Series, 835500-U3 |
Need More Info
We know that questions arise, and that sometimes you need more details or a closer look to make the right decision. That’s why we make it easy for you to reach out directly—so you’re never left wondering.
With our team, you’re just a message away from clarity and confidence. Whether you have a specific question, need a particular image, or want more details, the request form puts you in control. Let us know what you need, and we’ll bring the answers straight to you—no guesswork required!
Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for MKS Instruments. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.
- Quick Quotes:
- Receive price & availability FAST from our dedicated customer service team.
- Delivery:



Expedited, Freight, and International shipping available.- Returns:
- No hassle return policy.
- Repair:
- Our team of engineers are creative problem solvers who understand your challenges.
- Custom Calibration:
- You give us the specs and we do the rest.
What Customers Are Saying
- Gareth A.
We bought a Parker Compumotor Controller for our press and installed it 2 weeks ago. Easy fix for our machine and it is working perfect.
- Dongmin K.
Fast shipping on replacement parts we thought we’d never find!
- Matt R. Google
I found that the staff is very knowledgeable. I would recommend them to anyone looking for this type of equipment!
- Karen C. Google
I find the employees helpful and knowledgeable about their products.
- Jake S. Google
Excellent company, employees, and service! Tim, Ann, and Todd are stellar to work with during transactions.
- Angie R. Facebook
Fantastic company with great people! We are lucky to have them in Champaign!
- Arvind P.
We have some test equipment in our lab from the 1990's that stopped working about 2 years ago. It sat in the corner collecting dust, but we took on a project last month that required more machines. After talking to Artisan, we found out we could get parts to fix our machine for much less than buying a new one!
- Kevin K. Google
Great company staff is extremely knowledgeable!!
- 5,000+Manufacturers
- 50,000+Warehouse (sq ft)
- 148+Countries served
- 10,000+Lab / office (sq ft)
Our Mission
100% Satisfaction
We believe expertise is priceless. With over 25 years of experience, and top engineers on staff, we can help you solve or avoid problems that threaten your business.
Trust Guaranteed
Every item is inspected before it ships, much of our inventory is functionally tested in our onsite service center, and eligible purchases are backed by our Limited Warranty.
Expertise
Time is money, especially when your equipment is down. We work quickly to get your equipment on its way so you can get it back up and running.
Used equipment in excellent physical and cosmetic condition.
Every item ships with Artisan's stated warranty. In-house repair capability backs it up.
ITAR / DDTC registered, counterfeit mitigation for military COTS, and DMSMS obsolescence support.





















