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Features:
- MultiFlo Gas and Range Configurability
- User Accessible Service Port with Advanced Diagnostics with User-Friendly Interface
- Corrosion Resistant Hastelloy T-Rise Sensor
- Pressure Transient Insensitivity (PTI), and Safe Delivery System (SDS) Options
The Brooks Instruments GF Series High Purity/Ultra-High Purity Digital Thermal Mass Flow Devices are designed for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path. The GF100 Series mass flow controllers and
meters deliver outstanding performance, reliability, and flexibility. Highlights of the GF
Series industry-leading features include: ultra fast 300 millisecond settling time,
MultiFlo gas and range programmability, optional pressure transient insensitivity (PTI),
local display, extremely low wetted surface area, and corrosion resistant Hastelloy sensor
tube and valve seat. The GF100 Series has been marathon tested to over three times the
semiconductor industry standard for reliability, ensuring repeatable low-drift performance
over time. An independent diagnostic/service port permits users to troubleshoot or
change flow conditions without removing the mass flow controller from service.
The GF Series is a highly configurable platform based on a novel modular
architecture. Already widely adopted by semiconductor, vacuum thin film, solar, and
related customers, the GF100 Series feature set was carefully selected to enable drop-in
replacement and upgrade of most brands of metal-seal mass flow controllers, including
the former Celerity, UNIT, Tylan, and Mykrolis brands. With the wide range of options and
features available, the GF100 Series provides users with a path to simplification and
standardization, greatly reducing spares inventory and support costs.
The GF120CXXM-SH44860C Brooks Instrument High Purity/Ultra-High Purity Digital Mass Flow Controller may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).
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Brooks Instrument GF120CXXM-SH44860C High Purity/Ultra-High Purity Digital Mass Flow Controller Specs
General |
Manufacturer | Brooks Instrument |
Model | GF120CXXM-SH44860C |
Condition | Used and in Excellent Condition |
Product Family | GF100, GF120, GF125, GF120XSL, GF120XSD, GF125CXXC, GF |
Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for Brooks Instrument. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.
High Purity/Ultra-High Purity Digital Mass Flow Controller Price & Specs