107BA MKS Instruments Transducer

The MKS Instruments 107B Transducer is the result of over twenty five years experience with capacitance manometers and the addition of a new sensor design (Patent Pending). This design marks the first time that six decades of pressure measurement are available using a single capacitance manometer. When coupled with MKS Type 116 or 146 Power Supply/Readouts, the 107B can replace two or more pressure instruments in applications such as data logging or process control, where environmental and process conditions are particularly demanding. Only Inconel is exposed to the process, which permits use of corrosive or dirty gases, and eliminates contamination of the process with gauge materials.

Measurements are independent of gas composition; the 107B measures true total pressure, regardless of gas species or mixtures.

The Type 107B is the first MKS transducer to be digitally linearized. Linearization constants are stored inside EEPROM memory located in each transducer, and thus a 107B is usable with any 116 or 146 readout.

In normal operation, the 107B Transducer heater circuit warms the sensor to 45°C for good stability and to reduce process condensation.