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1480A-01353CR26M13 MKS Instruments Mass Flow Controller

Write a reviewStock # 95417-11
1 In StockAvailable today · ships from Champaign, IL
$495.00USD
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Item: MKS Instruments 1480A-01353CR26M13 Mass Flow Controller · Stock # 95417-11

Item details
Part Number1480A-01353CR26M13
In Stock1
AvailableToday
LocationChampaign, IL USAships worldwide
Stock #95417-11
Ship Weight5 lbs /ea
ConditionUsed and in Excellent Condition
InspectionBefore every shipment
Warranty1-Year Warranty with 30-Day Return Guarantee
Description
Configuration:
• Gas: Nitrogen
• Flow Rate: 5000 sccm
• Fittings: Swagelok 4 VCR Male
• Valve: Normally Open
• Connector: DeviceNet
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Item to Inspect: 95417-11 - MKS Instruments 1480A-01353CR26M13 Mass Flow Controller

More Information

MKS Instruments 1480A-01353CR26M13 Mass Flow Controller Overview

Features:

  • Metal Sealed
  • Reduces Process Cycle Times Due to Fast Gas Settling Times
  • Enables Better Chamber Matching Through Increased MFC Accuracy
  • Increases Tool Uptime Through Reduction on “No Problem Found” MFC Replacements
  • Reduces MFC Inventory Through Multigas, Multi-Range Capability
  • DeviceNet Configuration Significantly Reduces MFC Cabling
The MKS Instruments 1480A ALTA Mass Flow Controllers are all-digital Mass Flow Controllers (MFC) which include technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput and reduce overall system costs. To increase overall system throughput, the ALTA MFC features fast gas settling times to meet the productivity demands of next generation process tools. To facilitate better chamber matching, the ALTA features improved accuracy to 1% of set point

The MKS Instruments 1480A-01353CR26M13 Mass Flow Controller may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Mass Flow Controller Price & Specs

MKS Instruments 1480A-01353CR26M13 Mass Flow Controller Manuals, Datasheets, Drivers, Links

MKS Instruments 1480A-01353CR26M13 Mass Flow Controller Specs

General
ManufacturerMKS Instruments
Model1480A-01353CR26M13
ConditionUsed and in Excellent Condition
Product Family1480A, 1480A-28631, 1480A/28631, 1480A.28631, 1480A 28631, 1480A28631

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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.

Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for MKS Instruments. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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