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PCA-023TR MKS Instruments Integrated Pressure Controller

Write a reviewStock # 96083-2
2 In StockAvailable today · ships from Champaign, IL
$745.00USD
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Item: MKS Instruments PCA-023TR Integrated Pressure Controller · Stock # 96083-2

Item details
Part NumberPCA-023TR
In Stock2
AvailableToday
LocationChampaign, IL USAships worldwide
Stock #96083-2
Ship Weight5 lbs /ea
ConditionUsed and in Excellent Condition
InspectionBefore every shipment
Warranty1-Year Warranty with 30-Day Return Guarantee
Description
Configuration:
• Pressure Reading: Absolute
• Pressure Range Full Scale: 2000 Torr (mmHg)
• Fittings: Swagelok 4 VCR Male
• Electrical Connector: DeviceNet
• Valve Orifice: #3 (5000 sccm)
• Pressure Control: Upstream
• Valve Seal Material/Operation: Teflon/NO (≤30000 sccm Orifice Only)

Part Number: PCA023TR63UPAA
Jonathan L.Artisan product specialist

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Item to Inspect: 96083-2 - MKS Instruments PCA-023TR Integrated Pressure Controller

More Information

MKS Instruments PCA-023TR Integrated Pressure Controller Overview

Features:

  • Integral Baratron Capacitance Manometer Technology Provides for Accurate Measurement and Process Gas Pressure Control
  • Digital Control Loop Provides Rapid Response to Setpoint Independent of Gas Flow Rate Minimizing Process Cycle Time
  • Complete, Compact Pressure Control Package Minimizes Cost and Space Requirements
  • Straightforward Configuration, Tuning and Diagnostics Through its Ethernet Interface Utilizing a Standard Web Browser
  • Bright Rotatable LED 4 Digit Display Provides Easy Viewing of Process Pressure, Full Scale, Temperature and Ethernet IP Address
The MKS Instruments PC90 Series Integrated Pressure Controllers provides the latest in pressure measurement and control technology necessary to meet the process demands of the semiconductor and other leading edge process industries.

The PC90 Pressure Controller provides pressure measurement and control of process critical pressures utilizing MKS Instruments' industry leading Baratron capacitance manometer technology. The PC90 is manufactured with a Full Scale pressure from as low as 1000 torr up to 100 psia. Baratron capacitance manometers - well-known for their percent of reading accuracy, stability and resolution - provide precise measurements at lower pressures and over a wider dynamic range than strain gage transducers.

The PC90 Pressure Controller is a self-contained, compact, closed-loop electronic pressure control system designed for a wide range of pressure and flow conditions. It contains a capacitance manometer, normally closed or normally open control valve and closed-loop control electronics. The PC90 is available in either an upstream or downstream pressure control configuration making it well suited for controlling process chamber backpressure or process gas delivery pressure. With either digital (DeviceNet or RS-485) or analog I/O and its Ethernet setup and diagnostics capabilities, the PC90 is easily integrated into the process tool.

The MKS Instruments PCA-023TR Integrated Pressure Controller may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Integrated Pressure Controller Price & Specs

MKS Instruments PCA-023TR Integrated Pressure Controller Manuals, Datasheets, Drivers, Links

MKS Instruments PCA-023TR Integrated Pressure Controller Specs

General
ManufacturerMKS Instruments
ModelPCA-023TR
ConditionUsed and in Excellent Condition
Product FamilyPC90, PCA, PCA-28226, PCA/28226, PCA.28226, PCA 28226, PCA28226

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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.

Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for MKS Instruments. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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