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3M-14986 GSI Lumonics Module

Write a reviewStock # 63500-29
1 In StockAvailable today · ships from Champaign, IL
$300.00USD
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Item: GSI Lumonics 3M-14986 Module · Stock # 63500-29

Item details
Part Number3M-14986
In Stock1
AvailableToday
LocationChampaign, IL USAships worldwide
Stock #63500-29
Ship Weight1 lbs /ea
ConditionUsed and in Excellent Condition
InspectionBefore every shipment
Warranty1-Year Warranty with 30-Day Return Guarantee
Kylie S.Artisan product specialist

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Item to Inspect: 63500-29 - GSI Lumonics 3M-14986 Module

More Information

GSI Lumonics 3M-14986 Module Overview

Features:

  • 325 nm Laser and White Light Optical System
  • Four White Light Objectives 5x, 50x, 100, and 150x
  • 325nm 100x UV Objective
  • High-Resolution Color CCD Camera
  • 24-bit Integrated White Light Package
  • Precision XYZ Stage
  • Automatic Deskew
  • Dual Pentium PC with Jaz Drive
  • Auxillary 13 Inch Video Monitor
  • NFS SW Interface for Ethernet
  • Tencor File Format Interface
  • KLARF Format Interface
  • Integrated Mini-Environment
  • Exhaust Blower With Interconnect Ducts
  • 300mm Wafer Handler with Integrated 300mm Asyst Loadports and Hermos Carrier ID readers
  • SEMI Communication/Automation Standards: E84, E87, E40, E90 and E94
  • GEM/SECS 232 (SEMI-E4, E5 and E30)
  • Impact ADC option
The KLA-Tencor Confocal Review Station (CRS) is an automated laser/white light microscope system used for classification of defects on both bare and patterned wafers, using defect maps generated by a variety of instruments. The CRS combines a brightfield/darkfield white-light microscope with a laser confocal microscope, automated wafer handling, and controlling software.

The CRS can display any combination of a 2D focal plane image, a 3D surface image rotated to any orientation, any horizontal slice of a volume image, and vertical 2D cuts through any of the 3D images in XZ or YZ planes. The laser scan amplitude can vary for 1x, 2x, 4x, or 8x zoom within the same magnification of the microscope, providing on-screen magnification up to 20,000x with a 100x objective at Zoom level 8.

An important feature of the confocal microscope is its extremely narrow depth of focus in laser light, which makes it possible to view images of individual layers in semiconductor structures, and to resolve structural and defect features as small as 0.15 µm.

The CRS can be configured from fully manual operation to fully automated operation. There are manual and automatic options for cassette loading, wafer loading, deskew, defect inspection and analysis, image capture, data storage, and communication. The CRS can run automatically using locally stored recipes, or can receive commands and respond to them over a network.

The GSI Lumonics 3M-14986 Module may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Module Price & Specs

GSI Lumonics 3M-14986 Module Manuals, Datasheets, Drivers, Links

GSI Lumonics 3M-14986 Module Specs

External Frame
CleanlinessClass 1
Particle Generation<0.01 each of >0.3 µm added per 1 cm² per wafer pass in Class 1 environment
External PanelsStainless Steel
Air FlowCleanroom Laminar Air
Vibration Isolation3-point Active Air Damping & Leveling
FramePlated Mild Steel; Inert Gas-welded Construction
SupportTransport: 3-inch Textite Wheels (4); Operation: 2.5-inch Leveling Pads (4)
ControlsOn/Off, Emergency Off, Circuit Breakers, Laser Interlock System
Throughput based on 8-inch Wafers
Load Wafer to 1st Deskew Point128 s
Manual Deskew to 1st Defect15 s
AutoDeskew : 2 point20 s
Move & Focus2.4 s (live laser mode, 8 mm travel)
Unload Wafer13 s
Image Acquisition5.5 s (512 × 512 × 64)
Image Display (512 × 512 × 64)2 s
Image Storage (512 × 512 × 64)Surface Image:0.1 s
Volume Image:4.0 s
Facilities
Electrical - Main SystemAC 240/220/208/200 V, 1ø, 30 A @ 208 V
Air80 psi, 3 scfm
Vacuum20 in. Hg, 0.5 scfm
General
ManufacturerGSI Lumonics
Model3M-14986
ConditionUsed and in Excellent Condition
Product FamilyKLA-Tencor CRS-3100, KLA Tencor CRS 3100, KLA-Tencor CRS3100, KLA Tencor CRS3100, KLA CRS-3100, KLA CRS 3100, KLA CRS3100, Tencor CRS-3100, Tencor CRS 3100, Tencor CRS3100, CRS-3100, CRS3100, KLA-Tencor CRS-3000, KLA Tencor CRS 3000, KLA-Tencor CRS3000, KLA Tencor CRS3000, KLA CRS-3000, KLA CRS 3000, KLA CRS3000, Tencor CRS-3000, Tencor CRS 3000, Tencor CRS3000, CRS-3000, CRS3000

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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.

Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for GSI Lumonics. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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Used and in Excellent Condition

Used equipment in excellent physical and cosmetic condition.

Warranty
1-Year Warranty with 30-Day Return Guarantee

Every item ships with Artisan's stated warranty. In-house repair capability backs it up.

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