627C01TBAC1B1 MKS Instruments e-Baratron Capacitance Manometer with Ethernet Interface

The MKS Instruments 62xC/E2xC Series e-Baratron Capacitance Manometer with Ethernet Interface is part of the MKS family of general purpose process manometers designed to provide accurate, reliable, and repeatable pressure measurements in full-scale ranges from as low as 100 mTorr up to 1000T. The 62xC/E2xC is designed specifically to meet the needs of vacuum process systems where environmental and process conditions are particularly demanding.

The Ethernet interface on 62xC/E2xC includes a graphical user interface and is one of the new generation of MKS products that are TOOLweb compliant. The TOOLweb ToolSide Protocol provides an open, XMLbased interface between a server (sensor/instrument) and the client application.

The manometer can operate either with ±15 VDC (±5%) or +24 VDC (±10%) input power.

Temperature control of the 627C/E27C (45°C) and 628C/E28C (100°C) manometers minimizes the effects of ambient or process temperature variations typically encountered in process line environments. The 627C/E27C products control their temperature at 45°C (nominal). The 628C/E28C manometers are internally controlled at 100±C (nominal), thereby minimizing contamination from the process.

The manometer provides an output signal that is linear with pressure. Pressure output is manufactured as an analog 0 to 10 VDC signal and an Ethernet interface signal in selectable units of pressure through the Web browser embedded in the device. The analog signal is provided either through a 9-pin or 15-pin D-sub connector. Each device gets unique MAC ID and default user-resettable IP address for Ethernet communications via a standard RJ45 jack.

The 62xC/E2xC/E2xC unit exposes only Inconel to the process, permitting use with corrosive or dirty gases and eliminating contamination of the process with manometer materials. Measurements are independent of gas composition. Using the latest single-sided, dual-electrode Inconel manometer design, coupled with a low impedance, fixed-frequency bridge signal conditioner, this instrument is capable of withstanding high overpressure conditions (45 psia) with minimal or no shifts in output over their range. The advanced bridge signal conditioning technology provides high accuracy and operation which is extremely temperature-stable at operating pressure.

The Type 627C/E27C manometer has an accuracy of 0.10% of reading for most pressure ranges (0.1 Torr units have an accuracy of 0.15% of reading). The Type 628C/E28C manometer has an accuracy of 0.25% of reading (0.1T units have an accuracy of 0.50% of reading).

Protection from RF interference and noisy electrical environments is enabled by the use of a metallized case and internal design elements as well as surge and ESD suppression networks and RFI filtering on all inputs and outputs.