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830 Granville-Phillips Vacuum Quality Monitor Controller

Write a reviewStock # 52999-2
1 In StockAvailable today · ships from Champaign, IL
$395.00USD
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Item: MKS Instruments / Granville-Phillips 830 Vacuum Quality Monitor Controller · Stock # 52999-2

Item details
Part Number830
In Stock1
AvailableToday
LocationChampaign, IL USAships worldwide
Stock #52999-2
Ship Weight3 lbs /ea
ConditionUsed and in Excellent Condition
InspectionBefore every shipment
Warranty1-Year Warranty with 30-Day Return Guarantee
Description
The full model number is unknown.
Jonathan L.Artisan product specialist

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Item to Inspect: 52999-2 - MKS Instruments / Granville-Phillips 830 Vacuum Quality Monitor Controller

More Information

MKS Instruments / Granville-Phillips 830 Vacuum Quality Monitor Controller Overview

Features:

  • Combines Highest Performance Gas Analysis Technology with Outstanding Instrumentation Functional Design
  • Transforms Complex Measurement into Actionable Information
  • Data Collection, Spectral Decomposition, and Data Logging Over the Full 1-135 Amu Measurement
The MKS Instruments / Granville-Phillips 830 Series Vacuum Quality Monitors (VQM) combine the highest performance gas analysis technology with outstanding instrumentation functional design that transforms complex measurement into actionable information. The VQM System is the world's fastest, lowest power, gas compositional analysis instrument with full data collection, spectral decomposition, and data logging over the full 1-135 amu measurement range.

The VQM System is a mass spectrometer consisting of an Auto resonant Ion Trap Mass Spectrometry (ART MS) Gauge (hereafter referred to as the MS Gauge), the VQM Controller, an interconnect cable, and a VQM Viewer Software application. The MS Gauge mounts directly onto any standard 2.75" ConFlat port of a vacuum chamber. All of its internal components reside in the vacuum space where the gas analysis measurements are performed.

The Granville-Phillips 830 Vacuum Quality Monitor Controller may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Vacuum Quality Monitor Controller Price & Specs

MKS Instruments / Granville-Phillips 830 Vacuum Quality Monitor Controller Description

Functions

Monitors vacuum quality in thin film deposition, semiconductor fabrication, and industrial processes via real-time measurement of gas composition, pressure, and contamination levels using integrated sensors and control algorithms; interfaces with vacuum pumps, gauges, and process controllers through analog/digital I/O for automated regulation and diagnostics.

This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.

MKS Instruments / Granville-Phillips 830 Vacuum Quality Monitor Controller Manuals, Datasheets, Drivers, Links

MKS Instruments / Granville-Phillips 830 Vacuum Quality Monitor Controller Specs

General
ManufacturerGranville-Phillips
Model830
ConditionUsed and in Excellent Condition
Product Family830 Series, 830501-U1-0

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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.

Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for Granville-Phillips. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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Used and in Excellent Condition

Used equipment in excellent physical and cosmetic condition.

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