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901P-22030 Granville-Phillips Loadlock Transducer

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Item: MKS Instruments / Granville-Phillips 901P-22030 Loadlock Transducer · Stock # 62197-2

Item details
Part Number901P-22030
AvailabilityNot in Stock
LocationChampaign, IL USAships worldwide
Stock #62197-2
Ship Weight2 lbs /ea
ConditionUsed and in Excellent Condition
InspectionBefore every shipment
Warranty1-Year Warranty with 30-Day Return Guarantee
Description
Configuration:
• Type: 901P Piezo Transducer
• Flange: KF25
• Interface: RS485/Analog
• Analog Out: Standard MKS
• Connector Relays: D-Sub 15 Pin HD Male/Three Relays
• Enclosure: Standard/Viton Sealing
Diasholaun D.Artisan product specialist

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Item to Inspect: 62197-2 - MKS Instruments / Granville-Phillips 901P-22030 Loadlock Transducer

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MKS Instruments / Granville-Phillips 901P-22030 Loadlock Transducer Overview

Features:

  • Wide Pressure Measurement Range (0.00001 Torr up to Atmosphere)
  • MicroPirani Sensor for Low to Medium Vacuum Measurement
  • Piezo Sensor for Accurate Near-Atmospheric Pressure Sensing
  • Stable, Repeatable Readings Under Varying Conditions
The MKS Instruments / Granville-Phillips Series 901P Loadlock Vacuum Transducer is a compact, high-performance pressure sensor designed specifically for loadlock and vacuum process applications. It combines MicroPirani thermal conductivity sensing with a piezo-based pressure sensor in a single device, allowing it to accurately measure pressure from deep vacuum through atmosphere.

This dual-sensor design provides fast response, stable readings, and improved accuracy across the entire pump-down and vent cycle, making the 901P well-suited for semiconductor tools, research systems, and automated vacuum equipment. The transducer is intended for system integration and remote operation, with output and configuration handled through digital communication interfaces or external controllers rather than a front-panel display.

The 901P is widely used where reliable, repeatable pressure measurement is required to protect processes, automate sequencing, or monitor loadlock performance.

The Granville-Phillips 901P-22030 Loadlock Transducer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

Loadlock Transducer Price & Specs

MKS Instruments / Granville-Phillips 901P-22030 Loadlock Transducer Description

Functions

Measures vacuum pressure in loadlock chambers using piezo-resistive sensing technology. Operates across high to ultra-high vacuum ranges with RS485 digital and analog output capabilities. Features KF25 vacuum flange mounting for direct chamber integration. Provides real-time pressure monitoring with relay switching outputs for automated vacuum system control. Delivers precision pressure measurement for semiconductor processing, coating systems, and research applications requiring contamination-free vacuum monitoring in transfer chambers.

This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.

MKS Instruments / Granville-Phillips 901P-22030 Loadlock Transducer Manuals, Datasheets, Drivers, Links

MKS Instruments / Granville-Phillips 901P-22030 Loadlock Transducer Specs

General
ManufacturerGranville-Phillips
Model901P-22030
ConditionUsed and in Excellent Condition
Product Family901P, 9019-4E0V0,

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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.

Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for Granville-Phillips. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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