Stock #97192-3
$875.00USD
1 In StockUsed and in Excellent Condition
910-11020 MKS Instruments DualTrans MicroPirani/Absolute Piezo Transducer
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Item details
| Part Number | 910-11020 |
|---|---|
| Availability | Not in Stock |
| Location | Champaign, IL USAships worldwide |
| Stock # | 47431-1 |
| Ship Weight | 1 lbs /ea |
| Condition | Used and in Excellent Condition |
| Inspection | Before every shipment |
| Warranty | 1-Year Warranty with 30-Day Return Guarantee |
Description
Configuration:
• Flange: KF16
• Interface: RS232/Analog
• Analog Out: Standard MKS
• Connector Relays: SubD 15-Pin HD Male/No Relay
• Enclosure: Standard/Viton Sealing
Part Number: 910-11020
• Flange: KF16
• Interface: RS232/Analog
• Analog Out: Standard MKS
• Connector Relays: SubD 15-Pin HD Male/No Relay
• Enclosure: Standard/Viton Sealing
Part Number: 910-11020
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MKS Instruments 910-11020 DualTrans MicroPirani/Absolute Piezo Transducer Overview
Features:
- Two Sensors in a Single Transducer for Space Savings and Wide Measurement Range
- Ultra Compact Design
- Absolute Pressure Measurement from 1500 to 10sup>-2 Torr
- Gas Independent Absolute Pressure Measurement from 11 to 1500 Torr
The MKS Instruments 910 Series DualTrans MicroPirani/Absolute Piezo Transducers are designed specifically for wide-range pressure measurement applications. The 910 Series
Transducer combines Piezo and MicroPiraniā¢ sensor technologies. The combined output
provides significantly higher accuracy, stability, repeatability and a faster response time than
conventional thermal conductivity gauges.
The MKS Instruments 910 Series combines two pressure measurement technologies to provide superior performance and functionality. The MKS Instruments 910 Series provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors.
Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 series can read pressures down to 10sup>-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 series can be mounted in any orientation without compromising accuracy.
The MKS Instruments 910 Series combines two pressure measurement technologies to provide superior performance and functionality. The MKS Instruments 910 Series provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors.
Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 series can read pressures down to 10sup>-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 series can be mounted in any orientation without compromising accuracy.
The MKS Instruments 910-11020 DualTrans MicroPirani/Absolute Piezo Transducer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).
DualTrans MicroPirani/Absolute Piezo Transducer Price & Specs
MKS Instruments 910-11020 DualTrans MicroPirani/Absolute Piezo Transducer Description
Functions
Measures vacuum pressure from atmosphere to 1x10^-5 Torr using dual sensor technology combining thermal conductivity MicroPirani sensor for medium vacuum and piezo-resistive sensor for rough vacuum. Provides continuous pressure measurement with automatic sensor switching. Outputs pressure data via RS232 serial communication and analog voltage signal proportional to log pressure. Interfaces through high-density 15-pin SubD connector. KF16 flange enables direct mounting to vacuum chambers. Viton seals provide chemical compatibility. Applications include vacuum process control, pump monitoring, chamber pressure measurement, and leak detection in semiconductor, coating, and analytical instruments.
This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.
MKS Instruments 910-11020 DualTrans MicroPirani/Absolute Piezo Transducer Manuals, Datasheets, Drivers, Links
MKS Instruments 910-11020 DualTrans MicroPirani/Absolute Piezo Transducer Specs
| General | |
|---|---|
| Manufacturer | MKS Instruments |
| Model | 910-11020 |
| Condition | Used and in Excellent Condition |
| Product Family | 910 Series, 910-11020 |
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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for MKS Instruments. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.
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