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972B MKS Instruments DualMag Cold Cathode Transducer

Write a reviewStock # 97192-3
1 In StockAvailable today · ships from Champaign, IL
$875.00USD
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Item: MKS Instruments 972B DualMag Cold Cathode Transducer · Stock # 97192-3

Item details
Part Number972B
In Stock1
AvailableToday
LocationChampaign, IL USAships worldwide
Stock #97192-3
Ship Weight2 lbs /ea
ConditionUsed and in Excellent Condition
InspectionBefore every shipment
Warranty1-Year Warranty with 30-Day Return Guarantee
Description
Configuration:
• Sensor Type: Cold Cathode / MicroPirani (MEMS Thermal Conductivity)
• Measuring Range Absolute: 1 x 10-8 Torr to Atmosphere
• Set Point Range Absolute: 1 x 10-8 Torr to Atmosphere
• Set Point Range Differential: -760 to +100 Torr
• Digital Communications: RS485, RS232 or EtherCAT
• Flange: NW25 KF
• Interface: RS232
• Analog Out: Standard MKS
• Connector Relay: SubD 15-Pin HD Male/(3) Relays
• Enclosure Sealing: Standard/Viton Sealing

Part Number: 972B-21030
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Item to Inspect: 97192-3 - MKS Instruments 972B DualMag Cold Cathode Transducer

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MKS Instruments 972B DualMag Cold Cathode Transducer Overview

Features:

  • Small Footprint Design
  • Wide Measurement Range of 10-8 Torr to Atmosphere (972B and 974B)
  • Low Auto Cold Cathode Turn-On Pressure (972B and 974B)
The MKS Instruments 970B Series Cold Cathode Transducers are a family of compact, cost effective, general purpose transducers that utilize from one to four sensors - cold cathode, MicroPirani, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10-8 Torr. In addition to its small size, broad range and lower cost, the Series 970B can be operated via digital communication or as an autonomous analog unit.

The MKS Instruments 972B DualMag Cold Cathode Transducer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

DualMag Cold Cathode Transducer Price & Specs

MKS Instruments 972B DualMag Cold Cathode Transducer Description

Functions

Dual-sensor vacuum transducer combining cold cathode ionization gauge and MEMS-based thermal conductivity sensor for wide-range pressure measurement from ultra-high vacuum to atmosphere. Provides continuous pressure monitoring with three configurable relay setpoints for process control. Features RS232/RS485/EtherCAT digital interfaces and analog output for integration with vacuum controllers and PLCs. NW25 KF flange enables direct chamber mounting. Viton-sealed enclosure ensures compatibility with corrosive environments. Common applications include semiconductor processing, thin film deposition, analytical instrumentation, and research vacuum systems requiring precise pressure measurement across multiple decades.

This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.

MKS Instruments 972B DualMag Cold Cathode Transducer Manuals, Datasheets, Drivers, Links

MKS Instruments 972B DualMag Cold Cathode Transducer Specs

General
ManufacturerMKS Instruments
Model972B
ConditionUsed and in Excellent Condition
Product Family970B Series

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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.

Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for MKS Instruments. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.

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