T3BIA-26005 MKS Instruments High-Speed Exhaust Throttle Valve

MKS Instruments T3BIA-26005 High-Speed Exhaust Throttle Valve Overview

Features:

• Compact Pressure Control System
• Dual-Channel Baratron Manometer Input with Range Auto Switching
• Advanced Self-Tuning Control Algorithm

The MKS Instruments T3BIA-26005 High-Speed Exhaust Throttle Valve may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).

High-Speed Exhaust Throttle Valve Price & Specs

MKS Instruments T3BIA-26005 High-Speed Exhaust Throttle Valve Description

Functions

Industrial vacuum exhaust throttle valve engineered for high-speed pressure control in semiconductor processing chambers. Provides precise gas flow modulation through servo-controlled butterfly mechanism with sub-second response times. Integrates with turbomolecular pumps and process control systems via analog/digital interfaces for real-time pressure regulation. Features corrosion-resistant construction for reactive gas compatibility. Enables dynamic pressure transitions during multi-step processes including ALD, CVD, and etch applications. Maintains stable foreline pressure while preventing backstreaming. Supports automated recipe execution through PLC or computer control interfaces.

Platforms

The high-speed exhaust throttle valve operates in systems requiring precise pressure control in semiconductor manufacturing equipment. It is integrated into vacuum systems, interfacing with vacuum pumps and pressure sensors, using feedback loops and control algorithms for real-time pressure adjustments. The device utilizes digital and analog communication protocols for seamless interaction with process controllers and monitoring systems, ensuring optimized process conditions. It is suitable for integration in both standalone and cluster tool configurations within semiconductor fabrication plants, where maintaining specific vacuum levels is crucial.

Applications

Provides precise, high-speed pressure control in demanding vacuum process environments. Essential for maintaining critical chamber pressures during semiconductor etching, deposition, and epitaxy. Also utilized in advanced material processing, such as thin film deposition for solar cells and flat panel displays, where dynamic regulation of exhaust gas flow is paramount for process stability and yield optimization. Facilitates rapid transitions between pressure setpoints and suppresses pressure oscillations in highly responsive closed-loop control systems.

Accessories

Requires DN250 ISO-K flange connections on inlet and outlet ports. Control via 24VDC power supply and 0-10V analog command signal through 15-pin D-sub connector. Position feedback provided through same D-sub interface with 0-10V analog output. Optional DeviceNet or Profibus communication modules connect via 5-pin circular M12 connector. Pneumatic actuator requires 80-100 PSI compressed air supply through 1/4" NPT fitting. Integrated solenoid valve for fail-safe operation. Compatible with MKS Type 651C pressure controller for closed-loop pressure control applications. Mounting bracket kit available for vertical or horizontal installation orientations.

Interfaces

Power input via 25-pin female D-sub connector supporting trip points, analog pressure and position signals, TTL level inputs/outputs, and serial communications; optional 5-pin male Micro-D for DeviceNet communication; 9-pin male D-sub for RS232/Analog/TTL version; analog gauge inputs on 15-pin female D-sub connectors for dual pressure channels; alarm outputs through two relay contacts rated 2.0A at 30 VDC with status LEDs; valve power supplied at 11-25 VDC for CAN transceiver and 24 VDC up to 100 W max; optional ±15 VDC output at 650 mA for analog transducers; physical valve open/close switches included; integrally controlled with internal driver circuitry eliminating need for external modules[1][2].

Specifications

Designed for precise modulation of vacuum or process gas flow, this high-speed exhaust throttle valve operates within semiconductor and thin-film process tools. It integrates with stainless steel or aluminum vacuum chambers, offering rapid response times and stable flow control via pneumatic or electronic actuation. Interfaces include standard vacuum flanges (e.g., CF or ISO), and it supports integration with process control systems through analog or digital signals. Commonly applied in plasma etching, deposition systems, and vacuum load-locks to regulate chamber pressure and maintain process stability.

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MKS Instruments T3BIA-26005 High-Speed Exhaust Throttle Valve Manuals, Datasheets, Drivers, Links

• MKS Instruments T3BIA Series Datasheet (pdf)
• View all MKS Instruments products

MKS Instruments T3BIA-26005 High-Speed Exhaust Throttle Valve Specs

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