K2005 Coherent 248 nm, CaF2, Excimer Laser

Lambda Physik lasers have an advanced modular design that reduces the need for replacement parts, decreases the cost of consumables, and provides exceptional reliability for industrial operation. All mechanical, electronic, and optical modules offer easy maintenance and integration for microlithography applications. Maintenance access is on one side of the NovaLine unit, allowing a smaller footprint to provide more valuable cleanroom floor space and easy servicing. NovaLine has an internal computer that provides all the necessary diagnostic information required to ensure highly stable, trouble-free operation.


The line-narrowed model K2005 offers extremely narrow linewidth of less than 0.4 pm, FWHM, with 95 percent of the energy within a wavelength interval of less than 1.25 pm. In addition to the width at half maximum (FWHM), the spectral distribution of the laser output determines the contrast of the imaging lens. Based on the patented PCR resonator, the K2005 produces an extremely narrow output spectrum to optimize performance of advanced DUV lithography scanners with numerical apertures as high as 0.8.


NovaLine K2010 lasers are installed in quantities on the manufacturing floor. High reliability and low CoO has allowed Lambda Physik to steadily grow a customer base for this laser. The lasers operate with 2 kHz and 20 W output power. The bandwidth of 0.6 pm makes the K2010 compatible with most OEM DUV scanner systems.


The K2020 model has been designed for high throughput DUV scanner systems using a catadioptric imaging lens. This laser system, with a bandwidth of about 50 pm, provides high efficiency and significantly lower operating costs. The resonator is optimized for the relaxed bandwidth requirement. As a result, the output power is increased to 30 W and the overall operating cost of this DUV laser is reduced. Optimization of the NovaTube and discharge circuitry provide highly stable output with a standard deviation of less than 1 percent at 2 kHz repetition rate. PowerLok, a Lambda Physik proprietary energy control system, stabilizes the exposure dose with an accuracy of typically ±0.25 percent.