Stock #86516-1
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901P-4E0V0 MKS Instruments Loadlock Transducer
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Item details
| Part Number | 901P-4E0V0 |
|---|---|
| In Stock | 1 |
| Available | Today |
| Location | Champaign, IL USAships worldwide |
| Stock # | 62197-1 |
| Ship Weight | 1 lbs /ea |
| Condition | Used and in Excellent Condition |
| Inspection | Before every shipment |
| Warranty | 1-Year Warranty with 30-Day Return Guarantee |
Description
Configuration:
• VCR Process Fitting
• EtherCAT Digitial Interface
• No Local Display
This is an OEM-Configured EtherCAT version of the the Series 901P Loadlock Transducer.
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More Information
MKS Instruments / Granville-Phillips 901P-4E0V0 Loadlock Transducer Overview
Features:
- Wide Pressure Measurement Range (0.00001 Torr up to Atmosphere)
- MicroPirani Sensor for Low to Medium Vacuum Measurement
- Piezo Sensor for Accurate Near-Atmospheric Pressure Sensing
- Stable, Repeatable Readings Under Varying Conditions
The MKS Instruments / Granville-Phillips Series 901P Loadlock Vacuum Transducer is a compact, high-performance pressure sensor designed specifically for loadlock and vacuum process applications. It combines MicroPirani thermal conductivity sensing with a piezo-based pressure sensor in a single device, allowing it to accurately measure pressure from deep vacuum through atmosphere.
This dual-sensor design provides fast response, stable readings, and improved accuracy across the entire pump-down and vent cycle, making the 901P well-suited for semiconductor tools, research systems, and automated vacuum equipment. The transducer is intended for system integration and remote operation, with output and configuration handled through digital communication interfaces or external controllers rather than a front-panel display.
The 901P is widely used where reliable, repeatable pressure measurement is required to protect processes, automate sequencing, or monitor loadlock performance.
The MKS Instruments 901P-4E0V0 Loadlock Transducer may still be available for purchase and support from Artisan Technology Group beyond End-Of-Life (EOL) by the manufacturer (OEM).
Loadlock Transducer Price & Specs
MKS Instruments / Granville-Phillips 901P-4E0V0 Loadlock Transducer Description
Functions
Measures and monitors vacuum pressure levels in loadlock chambers using capacitance manometry technology. Features VCR process fitting for ultra-high vacuum connections and EtherCAT digital interface for real-time pressure data transmission to automated control systems. Operates across wide pressure ranges from atmosphere to high vacuum levels. Provides precise pressure feedback for loadlock cycling operations, chamber evacuation sequences, and automated material transfer processes in semiconductor fabrication and other vacuum processing applications.
This section includes content generated with the assistance of artificial intelligence (AI) tools. AI is used to increase efficiency and provide timely information. Please note that the content may not have been reviewed for accuracy or completeness. Use this information at your own discretion, and verify details independently as needed.
MKS Instruments / Granville-Phillips 901P-4E0V0 Loadlock Transducer Manuals, Datasheets, Drivers, Links
MKS Instruments / Granville-Phillips 901P-4E0V0 Loadlock Transducer Specs
| General | |
|---|---|
| Manufacturer | MKS Instruments |
| Model | 901P-4E0V0 |
| Condition | Used and in Excellent Condition |
| Product Family | 901P, 9019-4E0V0, |
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Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock item description. All prices are shown in USD.
Artisan Scientific Corporation dba Artisan Technology Group is not affiliated with or a distributor for MKS Instruments. The depiction, description, or sale of products featuring names, trademarks, brands, and logos is for identification and/or reference purposes only and does not indicate any affiliation with or authorization by any rights holder.
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