138-367 Veeco 1KÅ Calibration Standard

The Veeco / Sloan DEKTAK V 200-Si 200mm Wafer Surface Profiler is an advanced surface texture measuring system which accurately measures surface texture below submicro-inch and film thickness to 262 microns.

Measurements are made electromechanically by moving the sample beneath a diamond-tipped stylus. The high precision stage moves a sample beneath the stylus according to a user-programmed scan length, speed and stylus force. The stylus is mechanically coupled to the core of an L VDT (Linear Variable Differential Transformer). As the stage moves the sample, the stylus rides over the sample surface. Surface variations cause the stylus to be translated vertically. Electrical signals corresponding to the stylus movement are produced as the core position of the LVDT changes respectively. An analog signal proportional to the position change is produced by the LVDT, which in turn is conditioned and converted to a digital format through a high precision, integrating analog to digital converter. The digitized signals from a single scan are stored in computer memory for display, manipulation, measurement, and print. Stored programs that can be readily changed make the DEKTAK V 200-Si ideal for both production and laboratory use.