RGV100BL MKS Instruments High-Speed Precision Rotation Stage

The Newport RGV Series High-Speed Precision Rotation Stages can be used in applications like semiconductor wafer inspection, microrobotics, precision metrology and motion simulators, specifically for MEMS, gyros and accelerometer testing.

A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration, with minimal stage heating. At maximum continuous torque, the temperature of the motor increases by only 30°C.

To ensure precision, the glass encoder is mounted on a ground reference surface. For example, the RGV160's 28,800 pt encoder allows for outstanding MIM. It is perfectly aligned with the stage's rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout.

Due to direct-drive technology, the RGV series gains superior speeds and enhanced positioning. The direct-drive motor is non-contact, providing no wear and boosted reliability.

A 30 mm or 110 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage.

The RGV series features a proprietary 4-point contact ball bearing and a 2-piece design which integrates multiple functions, like the bearing ways and the direct drive motor, minimizing the number of parts. The result is a more compact rotation stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications.